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Round probe of probe card device

A probe card, circular technology, applied in the field of probes, can solve problems such as assembly difficulties

Pending Publication Date: 2020-11-10
CHUNGHWA PRECISION TEST TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, when the outer diameter of the existing circular probe is controlled to be no greater than 40 microns, the existing circular probe is easy to slip out of the probe holder, causing difficulties in assembly

Method used

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  • Round probe of probe card device
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  • Round probe of probe card device

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Embodiment Construction

[0020] see Figure 1 to Figure 6 , which is an embodiment of the present invention. What needs to be explained first is that this embodiment corresponds to the relevant quantities and shapes mentioned in the drawings, and is only used to specifically illustrate the implementation of the present invention, so as to facilitate the understanding of the content of the present invention. , not to limit the protection scope of the present invention.

[0021] like Figure 1 to Figure 3 As shown, the present embodiment discloses a probe card device 100, which includes a probe base 10 and one side abutting against the probe base 10 (such as: figure 1 An adapter plate 20 on the top side of the probe base 10), and the other side of the probe base 10 (such as: figure 1 The bottom side of the probe base 10) can be used to test an object under test (not shown in the figure, such as a semiconductor wafer).

[0022] It should be noted that, in order to facilitate the understanding of this ...

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PUM

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Abstract

The invention discloses a round probe of a probe card device. The round probe of the probe card device comprises a metal probe body and an insulating clamping tenon. The outer diameter of the metal probe body is not larger than 40 micrometers, and the metal probe body comprises a middle section, a first connecting section, a second connecting section, a first contact section and a second contact section, wherein the first connecting section and the second connecting section extend from the two opposite ends of the middle section respectively, the first contact section extends away from the middle section from the first connecting section, and the second contact section extends away from the middle section from the second connecting section. The insulating clamping tenon is formed on a partof the first contact section of the metal probe body, so that the tail end part of the first contact section protrudes out of the insulating clamping tenon. The maximum distance formed between the outer surface of the insulating clamping tenon and the adjacent outer surface part of the metal probe body is not greater than the outer diameter of the metal probe body. Therefore, the round probe canbe effectively prevented from penetrating through the first through hole and falling out of the first guide plate and the second guide plate in the probe implantation process.

Description

[0001] This application is a divisional application of the invention patent application with the application number 201710834758.9, the application date is September 15, 2017, and the invention name is "probe card device and its circular probe". technical field [0002] The invention relates to a probe, in particular to a circular probe of a probe card device. Background technique [0003] When the semiconductor chip is tested, the test equipment is electrically connected to the object under test through a probe card device, and the test result of the object under test is obtained through signal transmission and signal analysis. The existing probe card device is provided with a plurality of probes arranged corresponding to the electrical contacts of the object under test, so that the corresponding electrical contacts of the object under test can be point-contacted by the plurality of probes at the same time. [0004] More specifically, the probes of the conventional probe ca...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01R1/073
CPCG01R1/07314
Inventor 苏伟志谢智鹏
Owner CHUNGHWA PRECISION TEST TECH