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Semiconductor cooling and heating table

A cold and hot stage, semiconductor technology, applied in refrigerators, refrigeration components, refrigeration and liquefaction, etc., can solve the problems of high price of low-temperature medium, increased cost of using cold and hot stages, etc.

Pending Publication Date: 2020-11-13
重庆渝微电子技术研究院有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] In the field of material inspection and testing, hot and cold tables are an indispensable tool. Traditional cold and hot tables use heating wires and ultra-low temperature media to complete high and low temperature control. Low temperature media is expensive, which leads to the cost of using hot and cold tables. Increase

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  • Semiconductor cooling and heating table
  • Semiconductor cooling and heating table
  • Semiconductor cooling and heating table

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Embodiment Construction

[0019] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some of the embodiments of the present invention, not all of them. The following description of at least one exemplary embodiment is merely illustrative in nature and in no way taken as limiting the invention, its application or uses. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without creative work fall within the protection scope of the present invention.

[0020] The invention provides a semiconductor cold and hot stage, which can precisely control the temperature of the sample, and simultaneously perform atmosphere control and optical observation; at the same time, the cold and hot stage has small temperature gradient, high precision, and hi...

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PUM

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Abstract

The invention discloses a semiconductor cooling and heating table which is mainly composed of a bottom shell (100) and an upper cover (200), the bottom shell (100) and the upper cover (200) form a closed cavity, and the cavity can provide a required environment for a tested sample; a Peltier heating / cooling block (120), an XY differential moving sliding block (130) and a sample glass slide holder(131) are arranged in the bottom shell (100); the side wall (110) of the bottom shell is provided with a temperature control interface (122), air inlet and outlet (111 and 112), cooling medium inletsand outlets (113, 114, 125, 116, 121 and 123), an X-axis differential moving ruler (134) and a Y-axis differential moving ruler (135); the Peltier heating / cooling block (120) is positioned on a bottomplate in the bottom shell (100) and is used for controlling the temperature of the tested sample; the sample glass slide holder (131) is fixed on the XY differential moving slide block (130); and anobservation window (210) is arranged on the upper cover (200) and is used for observing the performance of a tested device in the testing process.

Description

technical field [0001] The invention relates to the field of material testing, in particular to a semiconductor cooling and heating platform. [0002] technical background [0003] In the field of material inspection and testing, hot and cold tables are an indispensable tool. Traditional cold and hot tables use heating wires and ultra-low temperature media to complete high and low temperature control. Low temperature media is expensive, which leads to the cost of using hot and cold tables. Increase. The study found that compared with the traditional heating method of electric heating wire, the temperature control of the semiconductor cooling and heating table using the Peltier chip temperature control system is more accurate, more convenient to use, and has obvious low cost advantages when the sample area is not large; their Another feature is that the glass slide can be used as a sample, and the position of the sample can be precisely positioned by the XY moving ruler, whic...

Claims

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Application Information

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IPC IPC(8): G01N21/03F25B21/04F25B49/00
CPCG01N21/0332F25B21/04F25B49/00F25B2321/0212F25B2321/0252
Inventor 王丽丽徐冬梅韩修刚
Owner 重庆渝微电子技术研究院有限公司