Nozzle cleaning device and nozzle cleaning method

Abstract

The invention provides a nozzle cleaning device and a nozzle cleaning method. According to the device and the method, the structure is simple, and a nozzle can be automatically cleaned. The nozzle cleaning device comprises a first tank body, a cooling device, a first cleaning tank, a second cleaning tank, a covering part, a first driving mechanism, a second driving mechanism and a controller; thecovering part comprises a mounting part for mounting the to-be-cleaned nozzle; the first tank body, the first cleaning tank and the second cleaning tank are arranged in the first direction; the firstdriving mechanism is in transmission connection with the second driving mechanism, the second driving mechanism is in transmission connection with the covering part, the first driving mechanism is used for driving the second driving mechanism to move in the first direction, and the second driving mechanism drives the covering part to move in a reciprocating mode in the second direction so as to drive the to-be-cleaned nozzle to be inserted into any one of the first tank body, the first cleaning tank and the second cleaning tank; and the controller controls the first driving mechanism and the second driving mechanism to move according to pre-stored moving information of the first driving mechanism and the second driving mechanism.

Description

technical field [0001] The invention relates to the technical field of cleaning, in particular to a nozzle cleaning device and a nozzle cleaning method. Background technique [0002] As the target material bombarded by high-speed energetic particles, the target is widely used in the fields of microelectronics, display and memory. During the preparation process of the target material, the liner needs to be sprayed to form the target material, which requires the use of nozzles. When the nozzles complete a spraying process or become clogged during the spraying process, the nozzles need to be removed for pickling. The residue on the inner wall of the nozzle is pickled to ensure that the inner wall of the nozzle is not clean during the spraying process and the powder clogging occurs. [0003] At present, the cleaning mainly relies on the operator to hold the nozzle to be cleaned with clamps and put it into the cleaning solution for cleaning. After cleaning, the nozzle is natural...

AI Technical Summary

Problems solved by technology

[0003] At present, the cleaning mainly relies on the operator to hold the nozzle to be cleaned with clamps and put it into the cleaning solution for cleaning. After cleaning, the nozzle is naturally blown dry, which is inconvenient to operate, and because the acidic cleaning solution is corrosive, it is easy to splash during the cleaning process. The operator poses a hazard

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