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Water-cooling and air-cooling integrated cooling equipment for production of semiconductors

A technology for production water and cooling equipment, which is applied in household refrigeration equipment, lighting and heating equipment, applications, etc., and can solve problems such as inconvenient cleaning, dust accumulation, and dust adhesion

Inactive Publication Date: 2020-11-20
李技涵
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] In semiconductor production, it is often necessary to use water-cooled and air-cooled integrated cooling equipment to cool down the semiconductor production equipment, so as to prevent the semiconductor production equipment from overheating. There is a lot of dust attached, and the water-cooled and air-cooled integrated cooling equipment needs to be disassembled and cleaned, which is inconvenient to clean. The existing water-cooled and air-cooled integrated cooling equipment is not easy to quickly clean the dust on the cooling pipe and the upper end of the cooling fin, resulting in dust accumulation, which takes time and effort.

Method used

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  • Water-cooling and air-cooling integrated cooling equipment for production of semiconductors
  • Water-cooling and air-cooling integrated cooling equipment for production of semiconductors
  • Water-cooling and air-cooling integrated cooling equipment for production of semiconductors

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Embodiment 1

[0030] see figure 1 and figure 2 , the present invention provides a water-cooled and air-cooled integrated cooling device for semiconductor production through improvement, including a fixed frame 1, a protective frame 5, a fan 6, a protective net 7, cooling fins 10, a mobile cleaning mechanism 11 and a collection mechanism 12, fixed The right end of the frame 1 is provided with a control panel 2, the front end of the control panel 2 is equipped with a button 3, the rear end of the fixed frame 1 is fixed with a power wire 4, the fixed frame 1 is connected with the rear end of the protective frame 5 by bolts, and the mobile cleaning mechanism 11 is installed and fixed on the fixed frame 1 top, the collection mechanism 12 slides and cooperates with the bottom of the fixed frame 1, the fan 6 is arranged inside the protective frame 5, the protective frame 5 is locked and fixed with the rear end of the protective net 7 by screws, and the front left end of the fixed frame 1 is provi...

Embodiment 2

[0035] The present invention provides a water-cooled and air-cooled integrated cooling device for semiconductor production through improvement. The collection frame 121 is in the shape of a cuboid with an open upper end, which is conducive to collecting sundries. There are two connecting pipes 8 in total, and The connecting pipes 8 are distributed symmetrically along the upper and lower sides of the left end of the fixed frame 1, which is beneficial to the water cooling cycle.

[0036] The present invention provides a water-cooled and air-cooled integrated cooling device for semiconductor production through improvement, and its working principle is as follows;

[0037] First, before use, place the water-cooled and air-cooled integrated cooling equipment for semiconductor production horizontally, make the fixed frame 1 fix and support the equipment, and fix the equipment to a suitable position on the upper end of the semiconductor production equipment by bolts, and Add an appro...

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Abstract

The invention discloses water-cooling and air-cooling integrated cooling equipment for production of semiconductors. The water-cooling and air-cooling integrated cooling equipment comprises a fixed frame, a protection frame, a fan, a protection net, a cooling fin, a movable cleaning mechanism and a collection mechanism. According to the water-cooling and air-cooling integrated cooling equipment, the movable cleaning mechanism is arranged at the upper end of the fixed frame, a motor is powered on to work, a belt is driven by a first belt wheel to conduct transmission at the upper end of a second belt wheel, a movable block drives a vertical plate to conduct linear movement, thus a brush plate cleans the upper ends of a cooling pipe and the cooling fin, and the advantage that dust at the upper ends of the cooling pipe and the cooling fin can be quickly cleaned is achieved; and the collection mechanism is arranged at the upper end of the fixed frame, the cleaned dust is guided and discharged to the inner side of a collection frame through a discharging groove, meanwhile, the collection frame is pulled and moves at the upper end of a sliding groove through a guiding block, thus the collection frame can be dismounted, and the advantage that the dust can be collected and removed is achieved.

Description

technical field [0001] The invention relates to the field related to semiconductor production, in particular to a water-cooled and air-cooled integrated cooling device for semiconductor production. Background technique [0002] Semiconductors refer to materials whose conductivity is between conductors and insulators at room temperature. Semiconductors are used in integrated circuits, consumer electronics, communication systems, photovoltaic power generation, lighting, high-power power conversion and other fields. For example, diodes are devices made of semiconductors. . [0003] In semiconductor production, it is often necessary to use water-cooled and air-cooled integrated cooling equipment to cool down the semiconductor production equipment, so as to prevent the semiconductor production equipment from overheating. There is a lot of dust attached, and the water-cooled and air-cooled integrated cooling equipment needs to be disassembled and cleaned, which is inconvenient to...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F25D1/00F25D1/02B08B1/00B08B15/04
CPCF25D1/00F25D1/02B08B15/04B08B1/30
Inventor 李技涵
Owner 李技涵