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Fluid control device

A technology for controlling equipment and fluids, applied in mechanical equipment, valve details, diaphragm valves, etc., to solve problems such as fluid leakage

Inactive Publication Date: 2020-11-24
FUJIKIN INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] However, the miniaturization of such thin films requires more frequent opening and closing operations than conventional ones for fluid control devices, and the load may easily cause fluid leakage, etc.

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0027] Hereinafter, a fluid control device according to an embodiment of the present invention will be described with reference to the drawings.

[0028] In addition, in the following description, for convenience, the directions of members and the like are referred to as up, down, left and right according to the directions on the drawings, but these directions do not limit the directions of members and the like during implementation or use of the present invention.

[0029] Such as figure 1 As shown, the fluid control device V according to this embodiment is a pneumatic direct diaphragm valve that incorporates a sensor for detecting the internal operation of the fluid control device V and performs wired communication with other terminals or the like.

[0030] In addition, the terminal referred to here includes not only so-called computers such as servers, but also devices and devices such as fluid control equipment and flow control devices.

[0031] The fluid control device V...

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PUM

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Abstract

Provided is a fluid control device with which data pertaining to the internal operations of the device can be acquired. A fluid control device (V) has a bonnet part (2) to which sensors (M1, M2, P) for detecting operations inside the fluid control device (V) are attached, and a valve body (1) inside of which the bonnet part (2) is accommodated, and the valve body (1) is provided with a recessed part (12a) for accommodating the bonnet part (2), and a slit (12b) which allows a communication cable (51) connected to the sensors (M1, M2, P) to be led out to the outer side, of which one end is openon the side opposite from a base part (11) where a flow channel is formed, and which passes through from the outer side to the recessed part (12a) side.

Description

technical field [0001] The present invention relates to a fluid control device that includes a sensor in the device and can output data detected by the sensor. Background technique [0002] In the film-forming process for forming a thin film on the surface of a semiconductor wafer, miniaturization of the thin film is required, and in recent years, a film-forming process such as ALD (Atomic Layer Deposition: Atomic Layer Deposition) that forms a thin film at the atomic or molecular level has been used. method. [0003] However, the miniaturization of such thin films requires more frequent opening and closing operations than conventional ones for fluid control devices, and the load may easily cause fluid leakage or the like. Therefore, the demand for a technology capable of easily detecting the leakage of the fluid of the fluid control device has increased. [0004] In addition, if not only easy detection of leakage, but also the collection of data accompanying the operation...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F16K27/02F16K7/12F16K37/00
CPCF16K7/17F16K31/1221F16K31/1226F16K27/0236F16K37/0033F16K37/0041F16K37/005F16K7/12F16K27/02F16K37/00F16K37/0025F16K7/16
Inventor 丹野龙太郎篠原努铃木裕也木曾秀则
Owner FUJIKIN INC