Heating wire assembly for CVD coating equipment heating cover

Abstract

The invention relates to the technical field of metal cutting tools and tool and mold coatings, and discloses a heating wire assembly for a CVD coating equipment heating cover. The heating wire assembly comprises an outer frame. An assembling and lifting block is fixedly mounted on the outer side of the outer frame, stand bars and bottom supporting plates are fixedly mounted at the bottom of the outer frame, a refractory material is fixedly mounted in the outer frame, and resistance wires are embedded into the refractory material. According to the heating wire assembly for the CVD coating equipment heating cover, multiple heating wire assemblies are combined to be put in the heating cover to replace the form of a whole, thus, the multiple heating wire assemblies can be independently controlled correspondingly, the temperatures of the heating wire assemblies can be controlled in a differentiation manner, thus, the multiple heating wire assemblies are combined to be put in the heating cover, relative to one whole heating wire assembly, according to the size and the weight of each heating wire assembly, the size is smaller, the weight is lower, and mounting and maintenance are convenient.

Description

technical field [0001] The invention relates to the technical field of metal cutting tools and mold coating, in particular to a heating wire assembly used in a heating cover of a CVD coating equipment. Background technique [0002] CVD is a method of forming a film on the surface of metal processing workpieces of other materials (substrates), such as molds, cutting tools, wear-resistant, corrosion-resistant parts, etc., especially the film formation method. The characteristic of chemical vapor deposition is that the reaction gas The chemical reaction of the compounds involved proceeds, the main product of the desired chemical reaction is deposited on the substrate surface and forms a coating or film there, possible reaction by-products appear in gaseous form and must be removed from the gas mixture In order to ensure the performance of the layer film, this is achieved through the exhaust pipeline. The service life of the coated cutting tools and tools will be greatly improve...

AI Technical Summary

Problems solved by technology

[0003] In the current common technology, there is only one integral large-size heating wire assembly in the entire heating cover. This method is a single integral heating wire assembly. The thermocouple controls the heating frequency of the heating cover through the temperature feedback of the heated object. If the resistance wire of this structure is blown at a certain position, the entire heating wire assembly needs to be replaced, which is expensive and cannot measure the heating wire assembly itself. temperature

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