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A miniature thermal conductivity gas sensor

A thermal conductivity gas and sensor technology, applied in the field of miniature thermal conductivity gas sensors, can solve problems such as application limitations and different flow rate ranges, and achieve the effects of low power consumption, extremely high power consumption, and positive volume

Active Publication Date: 2022-07-22
SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, for gases with different thermal conductivity, the applicable flow rate range of this method is different, so it is only suitable for analyzing gas mixtures with small differences in thermal conductivity, which greatly limits its application.

Method used

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  • A miniature thermal conductivity gas sensor
  • A miniature thermal conductivity gas sensor
  • A miniature thermal conductivity gas sensor

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Embodiment Construction

[0034] The present invention will be further described below in conjunction with specific embodiments. It should be understood that these examples are only used to illustrate the present invention and not to limit the scope of the present invention. In addition, it should be understood that after reading the content taught by the present invention, those skilled in the art can make various changes or modifications to the present invention, and these equivalent forms also fall within the scope defined by the appended claims of the present application.

[0035] see Figure 1-9 , the present invention, namely a miniature thermal conductivity gas sensor, comprises: a lower cover 1 and an upper cover 2 airtightly bonded with the lower cover 1, wherein:

[0036] The upper surface of the lower cover 1 is provided with: two floating hot wire assemblies 11 , two groups of pads 12 and four lower interface slots 13 , wherein,

[0037] The two groups of pads 12 are respectively close to o...

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Abstract

The invention relates to a miniature thermal conductivity gas sensor, comprising a lower cover and an upper cover airtightly bonded with the lower cover, the upper surface of the lower cover is provided with two suspended heating wire assemblies, wherein each Each hot wire assembly is connected to a group of pads; the lower surface of the upper cover is provided with two groups of first shallow slot air passages, air passages and second shallow slot air passages connected in sequence, wherein the two air passages are respectively connected with The two bypass test chambers are connected, and the positions of the two bypass test chambers correspond to the positions of the two hot wire assemblies. The invention can realize the shunt of the gas and prevent the flowing gas from blowing the hot wire directly, so that the entire micro thermal conductivity gas sensor is insensitive to the flow velocity, and can effectively reduce the noise generated by the fluctuation of the flow velocity of the gas path.

Description

technical field [0001] The invention relates to a gas sensor, in particular to a miniature thermal conductivity gas sensor. Background technique [0002] Thermal Conductivity Detector (TCD) is a non-destructive, physical and general-purpose detector, which realizes gas concentration detection by measuring the difference in thermal conductivity between the measured component and the carrier gas. The operating principle, basic theory and response characteristics of thermal conductivity detectors have been matured in the 1960s. It basically responds to all gas substances, and has the advantages of simple structure, reliable performance, accurate quantification, low price and durability. Since the thermal conductivity detector is non-destructive, it can also be used in conjunction with other detectors. Therefore, the thermal conductivity detector is always full of vigorous vitality and is still the most widely used detector. Micro Thermal Conductivity Detector (μ-TCD) is a th...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N25/20
CPCG01N25/20
Inventor 李铁王家钰王翊
Owner SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI