Initial phase calibration method of laser spiral scanning machining head
A helical scanning and initial phase technology, applied in laser welding equipment, metal processing equipment, manufacturing tools, etc., can solve the problems of cumbersome calibration steps and inability to achieve online calibration, and achieve high calibration efficiency, convenient operation, and high calibration accuracy Effect
Active Publication Date: 2020-12-01
XI'AN INST OF OPTICS & FINE MECHANICS - CHINESE ACAD OF SCI
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[0004] Aiming at the problems that the phase calibration of the laser spiral scanning processing head cannot realize online calibration and the calibration steps are cumbersome, the present invention provides an initial phase calibration method of the laser spiral scanning processing head
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[0024] The content of the present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments. However, these embodiments do not limit the present invention, and any structural, method, or functional changes made by those skilled in the art according to these embodiments are included in the protection scope of the present invention.
[0025] Such as figure 2 As shown, the implementation device of the initial phase calibration method of the laser spiral scanning processing head of the present invention includes a laser 1, a mirror 2, a parallel plate 3, an upper deflection wedge 4, a lower deflection wedge 5, a focusing mirror 6, a workpiece 7, a moving Mechanism 8 and Microscope 9. The upper deflection wedge 4 and the lower deflection wedge 5 form a deflection light group, the parallel plate 3 and the deflection light group are installed on a moving mechanism 8 that can move up and down, and the microscope 9 is u...
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The invention provides an initial phase calibration method of a laser spiral scanning machining head and solves the problems that online calibration cannot be realized and calibration steps are tedious in phase calibration of the laser spiral scanning machining head. The method comprises the following steps of step one, adjusting the angles of an upper deflection optical wedge and a lower deflection optical wedge in a deflection optical group; step two, after a laser beam passes through the laser spiral scanning machining head, forming a circular track through focusing; step three, recording the angles theta1 and theta2 of the upper deflection optical wedge and the lower deflection optical wedge at the moment when the circular track with the minimum diameter is found; step four, enabling the laser spiral scanning machining head in a defocusing state relative to a workpiece, and enabling the laser beam at a machining point A on the surface of the workpiece; step five, enabling a parallel flat plate to rotate by 180 degrees, and enabling the laser beam at a machining point B on the surface of the workpiece; and step six, conducting dotting on the surface of the workpiece, conductingobservation through a microscope till the position of a dotted point coincides with the midpoint of an AB connecting line, and recording the angle theta 3 of the parallel flat plate at the moment.
Description
technical field [0001] The invention belongs to the field of laser precision manufacturing, and in particular relates to an initial phase calibration method of a laser helical scanning processing head. Background technique [0002] The laser spiral scanning processing head is an optical instrument that makes the beam move spirally on the surface of the material through the high-speed movement of the internal optical device, so as to realize high-quality, large-depth-to-diameter ratio micro-hole processing. The currently widely used laser spiral scanning processing head is mainly composed of parallel flat glass, optical wedge, etc., such as figure 1 As shown, the initial phase angle of the internal optical device must be determined before processing, so that the projection of the beam on the XY plane of the processing head at different angles can be perpendicular to the hole wall. Therefore, the calibration of the initial phase angle is crucial for achieving high precision. ...
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Login to View More IPC IPC(8): B23K26/082B23K26/064B23K26/70
CPCB23K26/0643B23K26/082B23K26/702
Inventor 李明江浩
Owner XI'AN INST OF OPTICS & FINE MECHANICS - CHINESE ACAD OF SCI