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Anti-scratch wafer box

A wafer box, anti-scratch technology, applied in the direction of conveyor objects, electrical components, semiconductor/solid-state device manufacturing, etc., can solve the problems of easy errors, scratched wafers, and wear of mechanical arm parts, so as to avoid errors The effect of judging and preventing wafer scratches

Pending Publication Date: 2020-12-08
泉芯集成电路制造(济南)有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0002] The wafer box is a special carrier for placing wafers. When the product is produced, the robotic arm on the production equipment is inserted into the wafer box to grab the wafer. The parts of the robotic arm will wear out due to long-term use, resulting in grabbing or placing the wafer. Scratches the wafer when the arm is tilted
[0003] In the prior art, because the robot arm is easy to scratch the wafer, the height of the robot arm is usually corrected visually, and since the wafer box is an opaque container, the robot arm extends into the wafer box to check the grasping height and status It is impossible to get a good field of view, which is prone to errors, resulting in wafer scratches after inspection, and because the visual method cannot be quantified, everyone’s inspection standards cannot be consistent, and different people have different inspection standards. The visual method cannot solve the above problems well

Method used

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Examples

Experimental program
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Effect test

no. 1 example

[0038] Please refer to Figure 1 to Figure 6 , the present embodiment provides an anti-scratch wafer box 100, which can monitor the height of the robot arm in real time, prevent the robot arm from scratching the wafer 200, and can monitor the abnormal situation of the placement position of the wafer 200 to prevent the wafer 200 from being scratched. Improper placement will cause potential safety hazards.

[0039] The anti-scratch wafer box 100 provided in this embodiment includes a box body 110, at least one set of wafer support frames 130, and at least one light sensing device 150. The box body 110 has an opening 170 for a mechanical arm to enter; The round support frame 130 is arranged on the side wall of the box body 110, and the wafer support frame 130 is used to carry the wafer 200; the light sensing device 150 is arranged on the side wall of the box body 110, wherein the light sensing device 150 is used A light curtain 150a is formed above the wafer 200, and a warning mes...

no. 2 example

[0064] Please refer to Figure 7 , this embodiment provides an anti-scratch wafer box 100, its basic structure and principle and the technical effect produced are the same as those of the first embodiment, for a brief description, for the part not mentioned in this embodiment, please refer to the first Corresponding content in an embodiment.

[0065] In this embodiment, the anti-scratch wafer box 100 includes a box body 110, at least one set of wafer support frames 130, and at least one light sensing device 150. The box body 110 has an opening 170 for a mechanical arm to enter; The round support frame 130 is arranged on the side wall of the box body 110, and the wafer support frame 130 is used to carry the wafer 200; the light sensing device 150 is arranged on the side wall of the box body 110, wherein the light sensing device 150 is used A light curtain 150a is formed above the wafer 200, and an alarm is issued when the light curtain 150a is obstructed.

[0066] In this emb...

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Abstract

The embodiment of the invention provides an antiscratch wafer box, and relates to the technical field of semiconductor equipment, the antiscratch wafer box comprises a box body, at least one group ofwafer support frames and at least one light sensing device, and the box body is provided with an opening for a mechanical arm to extend into; the wafer support frame is arranged on the side wall of the box body, and the wafer support frame is used for bearing a wafer; the light sensing device is arranged on the side wall of the box body, and the light sensing device is used for forming a light curtain above the wafer and giving an alarm under the condition that the light curtain is blocked. When the height of the mechanical arm is abnormal, the mechanical arm interferes with the light curtain,the light curtain is blocked, and the light sensing device can give an alarm when the light curtain is blocked, so that an operator can know the abnormal height condition of the mechanical arm in time and stop the machine, the mechanical arm is effectively prevented from scratching a wafer, and meanwhile, the situation of misjudgment caused by insufficient visual field of a visual method is alsoavoided.

Description

technical field [0001] The invention relates to the technical field of semiconductor equipment, in particular to a scratch-resistant wafer box. Background technique [0002] The wafer box is a special carrier for placing wafers. When the product is produced, the robotic arm on the production equipment is inserted into the wafer box to grab the wafer. The parts of the robotic arm will wear out due to long-term use, resulting in grabbing or placing the wafer. When the arm tilts and scratches the wafer. [0003] In the prior art, because the robot arm is easy to scratch the wafer, the height of the robot arm is usually corrected visually, and since the wafer box is an opaque container, the robot arm extends into the wafer box to check the grasping height and status It is impossible to get a good field of view, which is prone to errors, resulting in wafer scratches after inspection, and because the visual method cannot be quantified, everyone’s inspection standards cannot be co...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/673H01L21/677
CPCH01L21/67346H01L21/67763
Inventor 黄志平黄德昇赖正训曾圣翔
Owner 泉芯集成电路制造(济南)有限公司