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Design of Laser Scanning Head for Three Optical Scanning Mirrors

A scanning mirror and beam scanning technology, applied in laser welding equipment, optics, optical components, etc., can solve the problem of lack of flexibility in defining scanning trajectories

Active Publication Date: 2022-04-01
THORLABS INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In other words, RG mode scans much faster than GG mode, but lacks the flexibility to define scan trajectories

Method used

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  • Design of Laser Scanning Head for Three Optical Scanning Mirrors
  • Design of Laser Scanning Head for Three Optical Scanning Mirrors
  • Design of Laser Scanning Head for Three Optical Scanning Mirrors

Examples

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Embodiment Construction

[0015] The exemplary embodiments described in accordance with the principles of the invention should be understood in conjunction with the accompanying drawings, which are to be considered a part of the entire written description. In describing the embodiments of the present invention disclosed herein, any references to directions or orientations are for convenience of description only and do not limit the scope of the present invention in any way. Related terms such as "below", "above", "horizontal", "vertical", "above", "under", "upper", "below", "top" and "bottom" and their derivatives Words such as "horizontally," "downwardly," "upwardly," etc., are to be understood as referring to the direction then being described or shown in the figure in question. Unless expressly stated otherwise, these relative terms are used for convenience of description only and do not require that the device be constructed or operated in a particular orientation. Unless expressly stated otherwis...

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Abstract

A scanning device, comprising: a first scanning mirror, a second scanning mirror, a third scanning mirror, a first relay lens, a second relay lens and a mirror; wherein the rotation axis of the second scanning mirror is relative to a reference The plane is inclined by a first angle, the optical axis of the first relay lens is inclined by the first angle relative to the reference plane, the optical axis of the second relay lens is parallel to the reference plane and orthogonal to the reference plane The optical axis of the first relay lens, and the rotation axis of the first scanning mirror is parallel to the reference frame; the first scanning mirror and the second scanning mirror, the first relay lens and the first scanning mirror The two relay lenses are arranged such that the respective axes of the first scanning mirror and the second scanning mirror, the first relay lens and the second relay lens are located at such a distance relative to the reference plane. on a plane inclined at the first angle.

Description

[0001] Cross References to Related Documents [0002] This application claims the benefit of U.S. Provisional Application No. 62 / 666,473, filed May 3, 2018. The disclosure of US Provisional Application No. 62 / 666,473 is incorporated herein by reference. technical field [0003] The present invention relates generally to laser scanning head design and, in particular, to the configuration of the position and orientation of scanning elements to optimize the size, scanning angle, scanning direction and optical performance of the laser scanning head. Background technique [0004] Confocal or two-photon laser scanning microscopes typically employ one of two scanning modes. One mode (hereinafter referred to as GG mode) utilizes two galvanometer scanning mirrors (Galvanometer scanning mirrors) to steer the laser beam on orthogonal axes in a raster pattern to cover a rectangular area. Another mode (hereinafter referred to as RG mode) is to use a resonant scanning mirror (Resonant s...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B26/10G02B21/00
CPCB23K26/0821G02B26/105G02B7/20G02B21/0048B23K26/0643G02B26/12B23K26/0869
Inventor H·Z·马
Owner THORLABS INC