Unlock instant, AI-driven research and patent intelligence for your innovation.

Correction method

A technology of feeding direction and retaining surface, which is applied in the field of correction and can solve problems such as deviation and inclination

Pending Publication Date: 2020-12-18
DISCO CORP
View PDF1 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0012] However, due to various factors such as the variation in the height of the mounting surface of the table base on which the chuck table is placed, the variation in the thickness of the chuck table, and the inclination of the rotation axis of the chuck table, the holding surface may be relatively The axis of rotation of the chuck table is tilted

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Correction method
  • Correction method
  • Correction method

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0028] An embodiment of one embodiment of the present invention will be described with reference to the drawings. figure 1 It is a perspective view of the cutting device 2 of the first embodiment. The cutting device 2 has a base 4 on which each component is mounted.

[0029] An X-axis moving mechanism (machining feed unit) 6 is provided on the upper surface of the base 4 . The X-axis moving mechanism 6 has a pair of X-axis guide rails 8 substantially parallel to the X-axis direction (machining feed direction, front-rear direction), and the X-axis moving table 10 is slidably attached to the X-axis guide rails 8 .

[0030] A nut portion (not shown) is provided on the lower (back) side of the X-axis moving table 10 , and an X-axis ball screw 12 parallel to the X-axis guide rail 8 is rotatably connected to the nut portion.

[0031] An X-axis pulse motor 14 is connected to one end of the X-axis ball screw 12 . When the X-axis ball screw 12 is rotated by the X-axis pulse motor 14...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

Provided is a correction method for correcting a holding surface such that the holding surface is substantially perpendicular to a straight line parallel to a rotation axis of a chuck table before edge trimming is performed using a cutting device. The correction method corrects the height of a holding surface of a cutting device. The cutting device has: a chuck table that is capable of holding a workpiece by suction by the holding surface, and is capable of rotating about a predetermined rotation axis; and a cutting unit to which a cutting tool having a cutting edge is mounted. The cutting unit includes a main shaft as a rotating shaft of the cutting tool. The correction method includes: a rotating step of rotating the chuck table; and a cutting step in which the lower end of a cutting tool that rotates about the main shaft is brought into contact with the holding surface of the rotating chuck table, thereby cutting the holding surface and correcting the height of the holding surface.

Description

technical field [0001] The present invention relates to a correction method for correcting the height of a holding surface of a chuck table of a cutting device. Background technique [0002] When cutting a plate-shaped workpiece represented by a semiconductor wafer, for example, a cutting device including a chuck table holding the workpiece and a cutting unit to which a ring-shaped cutting blade is attached is used. The cutting unit includes, for example, a main shaft, an annular cutting tool attached to one end of the main shaft, and a rotary drive source attached to the other end of the main shaft. [0003] In the case of cutting a workpiece, in a state where one side of the workpiece is held by the holding surface of the chuck table, the lower end of the rotating cutting tool is positioned on a lower side than the one surface of the workpiece. low position. Then, the chuck table and the cutting unit are relatively moved to cut the workpiece along the moving path. [00...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
IPC IPC(8): B28D5/02B28D7/00B28D7/04H01L21/67H01L21/687
CPCB28D5/023B28D5/0058B28D5/007B28D5/0094B28D5/0064H01L21/67092H01L21/68792H01L21/78H01L21/67259H01L21/6838H01L21/68764
Inventor 小松淳
Owner DISCO CORP