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MEMS inertial sensor with high resistance to stiction

An inertial sensor and inertial technology, applied in the field of MEMS inertial sensors, can solve the problems of not allowing free choice and maximizing the safety factor

Active Publication Date: 2020-12-22
STMICROELECTRONICS SRL
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, current constructional requirements such as bandwidth, packaging, noise, and full-scale range do not allow free choice of the above-mentioned constructional parameters, therefore, it is not always possible to maximize the safety factor α

Method used

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  • MEMS inertial sensor with high resistance to stiction
  • MEMS inertial sensor with high resistance to stiction
  • MEMS inertial sensor with high resistance to stiction

Examples

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Embodiment Construction

[0041] figure 2 Shown is a MEMS inertial sensor, in particular a capacitive MEMS accelerometer 30, configured to detect external accelerations oriented along a sensing axis S in a first plane XY of a Cartesian reference system XYZ ( In particular, it extends parallel to the first Cartesian axis Y) of the Cartesian reference system XYZ. especially, figure 2 The MEMS accelerometer 30 is shown under resting conditions.

[0042] The MEMS accelerometer 30 comprises a first inertial mass 33 and a second inertial mass 34 of semiconductor material (e.g. silicon) having a first mass m1 and a second mass m1, respectively. Mass m2. In general, for the same sensitivity and behavior of the MEMS accelerometer 30, as explained in detail below, the sum of the first mass m1 and the second mass m2 is equal to Figure 1A to Figure 1B The mass m of the MEMS accelerometer 1, and for example, the second mass m2 is greater than the first mass m1. For example, the ratio m1 / m2 between the first...

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Abstract

The embodiment of the invention relates to an MEMS internal sensor with hight resistance to stiction. An inertial structure is elastically coupled through a first elastic structure to a supporting structure so as to move along a sensing axis as a function of a quantity to be detected. The inertial structure includes first and second inertial masses which are elastically coupled together by a second elastic structure to enable movement of the second inertial mass along the sensing axis. The first elastic structure has a lower elastic constant than the second elastic structure so that, in presence of the quantity to be detected, the inertial structure moves in a sensing direction until the first inertial mass stops against a stop structure and the second elastic mass can move further in thesensing direction. Once the quantity to be detected ends, the second inertial mass moves in a direction opposite to the sensing direction and detaches the first inertial mass from the stop structure.

Description

technical field [0001] The present disclosure relates to a MEMS (Micro Electro Mechanical System) inertial sensor with high resistance to stiction. In particular, reference is made hereinafter to capacitive MEMS accelerometers. Background technique [0002] As is known, MEMS accelerometers comprise a suspended inertial mass having a main plane of extension. Typically, due to external accelerations, the carried inertial mass moves in a direction (sensing axis) lying in or parallel to the main extension plane. [0003] For example, Figure 1A and Figure 1B A known capacitive MEMS accelerometer 1 is shown in two different operating positions. In particular, the MEMS accelerometer 1 extends in a first plane XY of a Cartesian reference system XYZ and has a first Cartesian axis Y extending in the same first plane XY (in particular parallel to the Cartesian reference system XYZ) The sensing axis S. in detail, Figure 1A The MEMS accelerometer 1 is shown under stationary condi...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01P15/125
CPCG01P15/125G01P2015/0814G01P2015/0871B81C1/00968B81B2201/0235B81B2201/0242B81B2201/033B81B2203/0163G01P2015/0874
Inventor G·加特瑞F·里奇尼A·托齐奥
Owner STMICROELECTRONICS SRL