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Conveying device for conveying at least one wafer

A technology for conveying devices and wafers, which is applied to holding devices using magnetic attraction or thrust, electromechanical devices, transportation and packaging, etc. It can solve problems such as limitations and achieve the effect of good design, large air gap, and large lifting height.

Pending Publication Date: 2021-01-15
ROBERT BOSCH GMBH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, this hitherto common way of wafer transport within modular hub tools leads to limitations when designing modular hub tools

Method used

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  • Conveying device for conveying at least one wafer
  • Conveying device for conveying at least one wafer
  • Conveying device for conveying at least one wafer

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0055] figure 1 A transport device 10 according to a preferred embodiment is schematically shown in plan view. The transport device 10 is used to transport at least one wafer 36 . Here, the transport device 10 has, for example, two transport bodies 200 . Each transport body 200 is provided for carrying and / or holding at least one wafer 36 , for example by forming part of the transport body 200 in the manner of a gripper. Furthermore, the transport device 10 is provided to move the transport body 200 two-dimensionally on the transport surface 35 .

[0056] The conveying body 200 can move substantially freely on the conveying surface 35 and here brings the wafer 36 to the processing station 37 and optionally even holds the wafer in the processing station 37 or even positions and / or orients the wafer as shown. in it. Nevertheless, in order to be able to ensure that the interior of the processing station 37 is separated from the environment as well as possible, for example a s...

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PUM

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Abstract

The invention relates to a conveying device (10) for conveying at least one wafer (36), comprising at least one transport body (200), wherein the transport body (200) is designed at least for supporting or holding a wafer (36), and wherein the conveying device (10) is designed to move the at least one transport body (200) at least two-dimensionally on a conveying surface (35).

Description

technical field [0001] The invention relates to a transport device for transporting at least one wafer and a method for operating the transport device. Preferably, a magnetic levitation is used here for buoyant transport and / or for positioning and / or orientation of at least one wafer. Here, the solution proposed here can preferably be applied in the field of semiconductor manufacturing. Background technique [0002] In the context of semiconductor manufacturing, objects such as wafers often have to be transported or positioned. For this purpose, transport systems that move the wafers on fixed running rails or rails are traditionally used. Correspondingly defined running rails or rails usually only allow what is also called one-dimensional movement, which has the disadvantage, in particular, that the wafers are transported in a defined sequence and in particular the trailing wafers are pulled forward ahead of the front crystals ( Vorziehen) is usually not feasible. [000...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/677G03F7/20H02K41/03H02N15/00F16C32/04
CPCH01L21/67709H01L21/67724H02K41/031H02K2213/09B65G54/02H01L21/67736B65G2811/0668
Inventor H·拉茨B·韦尔赫斯特J·弗兰根
Owner ROBERT BOSCH GMBH