A non-contact inspection stage for high-precision high-surface substrates

Abstract

The invention discloses a non-contact detection carrier for a high-precision high-surface bottom plate, which includes a chassis base, a peripheral casing, a left clamping piece, a right clamping piece, a parallel light irradiation component and a light sensing device. A right clamping piece is vertically fixed on the right side of the upper end surface of the chassis base, and a left clamping piece is vertically fixed on the left side of the upper end surface of the chassis base. direction; the right clamping part adjusts the right side of the high-precision high-surface bottom plate horizontally; focus parallel light rays, and obliquely direct the surface of the high-precision high-surface bottom plate; a photosensitive device is vertically installed on the side of the chassis base close to the right clamping piece.

Description

technical field [0001] The invention relates to the technical field of high-precision bottom plate detection equipment, in particular to a non-contact detection carrier for high-precision high-surface bottom plates. Background technique [0002] The surface manufacturing accuracy of the workpiece plate will have varying degrees of influence on the coating performance, thermal conductivity and contact resistance, reflection and radiation performance of the part, resistance to liquid and gas flow, and current flow on the conductor surface, so it has become a key concern one of the indicators. Especially for the detection of high-precision and high-surface bottom plates, the most commonly used method is the stylus-type detection method. In order to ensure the accuracy of the results, the roughness equipment used for mass production inspection in the laboratory mostly uses contact-type stylus probes. The sample is not fixed and there is a height difference, which causes problem...

AI Technical Summary

Problems solved by technology

Especially for the detection of high-precision and high-surface bottom plates, the most commonly used method is the stylus-type detection method. In order to ensure the accuracy of the results, the roughness equipment used for mass production inspection in the laboratory mostly uses contact-type stylus probes. The sample is not fixed and there is a height difference, which causes problems such as sliding and poor contact between the measuring head stylus and the sample, which affects the accuracy of the test results. Material measurement quality, so it is necessary to propose a non-contact inspection stage for high-precision high-surface substrates to solve the above problems

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