High-hardness corrosion-resistant coating, preparation method thereof and application of high-hardness corrosion-resistant coating

Abstract

The invention provides a high-hardness corrosion-resistant coating, a preparation method thereof and application of the high-hardness corrosion-resistant coating, and relates to the technical field ofcoating preparation. The high-hardness corrosion-resistant coating provided by the invention is comprises the following components by atomic percentage: 3%-14%of Si, 30%-33% of Ti and 55%-66%t of B;and the high-hardness corrosion-resistant coating is of a Ti(Si)B2 solid solution structure. Compared with a traditional binary boride coating, the high-hardness corrosion-resistant coating provided by the invention has higher hardness and corrosion resistance, keeps relatively low resistivity, and is suitable for protecting a metal bipolar plate of a fuel cell.

Description

technical field

[0001] The invention relates to the technical field of coating preparation, in particular to a high-hardness corrosion-resistant coating and its preparation method and application. Background technique

[0002] A large part of the current energy consumption comes from fossil resources such as oil and coal. Fossil resources are gradually being depleted, their sustainability cannot be guaranteed, and they will cause irreversible damage to the environment. Therefore, some clean, environmentally friendly and sustainable new energy sources are needed to replace fossil energy sources, such as fuel cells. Fuel cells obtain energy through chemical reactions, are highly efficient, and are non-polluting. However, there are still many problems in the process of fuel cell development and upgrading. The fuel cell bipolar plate is an important part of the fuel cell, and common bipolar plate materials include graphite, metal, etc. Although graphite bipolar plates have t...

Examples

preparation example Construction

[0024] The present invention also provides a method for preparing the high-hard corrosion-resistant coating described in the above technical solution, comprising the following steps:

[0025] in TiB 2 The target and the Si target are target materials, and the high-hardness corrosion-resistant coating is obtained by sputtering on the substrate surface by using a magnetron sputtering method.

[0026] In the present invention, the TiB 2 The purity of the target is preferably 99 to 99.99%; the TiB 2 The target is preferably a cylinder with a diameter of preferably 40-80 mm, more preferably 60 mm, and a thickness of 5 mm. In the present invention, the TiB 2 The target is preferably subjected to pre-sputtering to remove impurities such as oxides on the surface of the target. In the present invention, the pre-sputtering is preferably carried out under the condition of argon atmosphere, when the pre-sputtering is TiB 2 The power of the target is preferably 100W, and the time is p...

Embodiment 1

[0040] Substrate pretreatment: Before loading the single crystal Si(100) substrate and polished titanium foil into the coating chamber, they should be ultrasonically cleaned, and the single crystal Si(100) substrate and polished titanium foil should be placed in acetone, ethanol, etc. and deionized water for 15 minutes after ultrasonication, and each step was dried with nitrogen to obtain a substrate with a clean surface;

[0041] Place the target and evacuate the coating chamber: TiB 2 Put the target and Si target into the target platform, then put the single crystal Si (100) substrate and polished titanium foil into the sample tray, close the coating chamber, close the air release valve, and then use the mechanical pump and the molecular pump to reduce the pressure of the coating chamber to Draw up to 6×10 -5 Pa;

[0042] Pre-sputtering: Before sample preparation begins, TiB 2 The target and the Si target were sputtered in an argon atmosphere for 20 minutes; during sputte...

Embodiment 2

[0046] The preparation method is basically the same as that of Example 1, except that the power of the Si target is 20W. The atomic content of Si in the obtained high-hard corrosion-resistant coating is 3%, the atomic content of Ti is 31%, and the atomic content of B is 66%; The potential is 0.11V, and the self-corrosion current is 9×10 -7 A / cm 2 , AC impedance is 5×10 4 Ω / cm 2 ; Its resistivity remains at 1176μΩ·cm.

technical field

[0001] The invention relates to the technical field of coating preparation, in particular to a high-hardness corrosion-resistant coating and its preparation method and application. Background technique

[0002] A large part of the current energy consumption comes from fossil resources such as oil and coal. Fossil resources are gradually being depleted, their sustainability cannot be guaranteed, and they will cause irreversible damage to the environment. Therefore, some clean, environmentally friendly and sustainable new energy sources are needed to replace fossil energy sources, such as fuel cells. Fuel cells obtain energy through chemical reactions, are highly efficient, and are non-polluting. However, there are still many problems in the process of fuel cell development and upgrading. The fuel cell bipolar plate is an important part of the fuel cell, and common bipolar plate materials include graphite, metal, etc. Although graphite bipolar plates have t...

Examples

preparation example Construction

[0024] The present invention also provides a method for preparing the high-hard corrosion-resistant coating described in the above technical solution, comprising the following steps:

[0025] in TiB 2 The target and the Si target are target materials, and the high-hardness corrosion-resistant coating is obtained by sputtering on the substrate surface by using a magnetron sputtering method.

[0026] In the present invention, the TiB 2 The purity of the target is preferably 99 to 99.99%; the TiB 2 The target is preferably a cylinder with a diameter of preferably 40-80 mm, more preferably 60 mm, and a thickness of 5 mm. In the present invention, the TiB 2 The target is preferably subjected to pre-sputtering to remove impurities such as oxides on the surface of the target. In the present invention, the pre-sputtering is preferably carried out under the condition of argon atmosphere, when the pre-sputtering is TiB 2 The power of the target is preferably 100W, and the time is p...

Embodiment 1

[0040] Substrate pretreatment: Before loading the single crystal Si(100) substrate and polished titanium foil into the coating chamber, they should be ultrasonically cleaned, and the single crystal Si(100) substrate and polished titanium foil should be placed in acetone, ethanol, etc. and deionized water for 15 minutes after ultrasonication, and each step was dried with nitrogen to obtain a substrate with a clean surface;

[0041] Place the target and evacuate the coating chamber: TiB 2 Put the target and Si target into the target platform, then put the single crystal Si (100) substrate and polished titanium foil into the sample tray, close the coating chamber, close the air release valve, and then use the mechanical pump and the molecular pump to reduce the pressure of the coating chamber to Draw up to 6×10 -5 Pa;

[0042] Pre-sputtering: Before sample preparation begins, TiB 2 The target and the Si target were sputtered in an argon atmosphere for 20 minutes; during sputte...

Embodiment 2

[0046] The preparation method is basically the same as that of Example 1, except that the power of the Si target is 20W. The atomic content of Si in the obtained high-hard corrosion-resistant coating is 3%, the atomic content of Ti is 31%, and the atomic content of B is 66%; The potential is 0.11V, and the self-corrosion current is 9×10 -7 A / cm 2 , AC impedance is 5×10 4 Ω / cm 2 ; Its resistivity remains at 1176μΩ·cm.

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