Ultra-high voltage sputtering-resistant film pressure transmitter and manufacturing method thereof
A technology of sputtering thin film and ultra-high voltage, which is applied in the direction of measuring fluid pressure, instruments, force/torque/power measuring instruments, etc. It can solve problems such as stress can not be released, loss of measurement accuracy, pressure signal drift, etc., to improve withstand voltage The ability to reduce the effect of high voltage shock
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[0035] The following are specific embodiments of the present invention and in conjunction with the accompanying drawings, the technical solutions of the present invention are further described, but the invention is not limited to these embodiments.
[0036] Such as Figure 1-2 As shown, an ultra-high voltage resistant sputtering film pressure transmitter includes:
[0037] The joint 100, the joint 100 is mainly used to protect its internal components, and is used to install the pressure transmitter to other components.
[0038] Sintered base 200, the sintered base 200 is installed in the joint 100, and there is a buffer between the bottom surface of the sintered base 200 and the joint 100, in the case of violent movement, there will be a small gap between the sintered base 200 and the joint 100 The relative displacement of the sintered base 200 avoids the direct collision between the joint 100, avoids the transfer of installation stress to the pressure core 500, and eliminate...
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