A high power (HP) generator (10) and a method for delivering pulsed high power at
high voltage and / or current values to a capacitive load, in particular a
plasma process, comprising: - several low power (LP) generators (14, 16, 18), each LP generator (14, 16, 18) includes an
energy storage component (C1, L1), and in use, the
energy storage component (C1, L1) is charged to a predetermined value associated with the
energy storage component; each LP generator (14, 16, 18) when in use provides at its output an LP generator value corresponding to the value of an energy storage component (C1, C2, Cn, L1, L2, Ln) incorporated in the respective LP generator (14, 16, 18); Several low power (LP) generators (14, 16, 18); - a
coupling (20), the LP generators (14, 16, 18) being electrically connected such that a
coupling value at an output of the
coupling (20) can be obtained which corresponds to an output value of the HP generator (10) and which is higher than the LP generator value at the output of one of the LP generators (14, 16, 18) during use, at least in some states of the HP generator (10); - a
control unit (22) configured to select the contribution of the LP generators (14, 16, 18) to the output value of the HP generator (10) during the power delivery of the HP generator (10) in order to produce a rise and / or a decay of a pulse at the output of the coupling (20); Including, At least one, preferably several and most preferably all LP generators (14, 16, 18) comprise an LP generator value limiting circuit (151), e.g. a
voltage limiting circuit or a
current limiting circuit.