Fabrication method of self-powered gas sensor based on single-walled carbon nanotubes

A technology of single-walled carbon nanotubes and gas sensors, which is applied in semiconductor devices, instruments, scientific instruments, etc., can solve the problems such as the difficulty of battery replacement, and achieve the effects of low cost, improved resolution, and easy mass production

Active Publication Date: 2022-04-05
INST OF METAL RESEARCH - CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In addition, due to the Internet of Things technology, the number of nodes is extremely large and the distribution range is extremely wide, and it is difficult to replace the battery
However, there are no reports of the combination of these two techniques

Method used

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  • Fabrication method of self-powered gas sensor based on single-walled carbon nanotubes
  • Fabrication method of self-powered gas sensor based on single-walled carbon nanotubes
  • Fabrication method of self-powered gas sensor based on single-walled carbon nanotubes

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0036] Embodiment 1: Using a gas sensor testing system, the self-powered gas sensor prepared above was put into a transparent sensor testing system. Under light conditions, no external power supply is applied, and the self-powered gas sensor of the present invention is tested against 100ppm NO 2 response performance.

[0037] Under the condition of light, the self-powered sensor directly converts light energy into electrical energy to drive the sensor components to work, and obtains a response performance curve that is not weaker or even better than the external power supply ( image 3 ), compared with the condition of external power supply, the integrated self-powered gas sensor has a more obvious response amplitude, faster response time and recovery time, and a very weak curve shift, which is closer to the ideal square wave curve.

Embodiment 2

[0038] Embodiment 2: Using the gas sensor testing system, the prepared flexible self-powered sensor is put into a transparent sensor testing system. Under light conditions, no external power supply is applied, and the self-powered gas sensor of the present invention is tested against 100ppmNH 3 response performance.

[0039] The flexible self-powered sensor directly converts light energy into electrical energy under illumination conditions, drives the sensor assembly to work, and obtains a curve similar to that of Example 1, the difference is that Example 1 has a NO of 100ppm 2 Under the atmosphere, the current increases; and in Example 2, when the sensor is exposed to 100ppm of NH 3 Atmosphere, the current decreases.

Embodiment 3

[0040] Embodiment 3: Using a gas sensor testing system, the prepared sensor is put into a transparent cavity of the sensor testing system. Under conditions such as illumination, do not apply external power supply, test self-powered gas sensor of the present invention to 100ppmO 2 response performance.

[0041] Under the condition of light, the flexible self-powered sensor directly converts light energy into electric energy to drive the sensor component to work, and obtains a response curve similar to that of Example 1.

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Abstract

The invention relates to gas sensor technology, in particular to a preparation method of a self-powered gas sensor based on single-walled carbon nanotubes. High-quality single-walled carbon nanotube films were prepared and collected by floating catalyst chemical vapor deposition, and directly transferred and loaded on a flexible transparent substrate. Prepare solar photovoltaic cells by mass junction, and then use electrode materials, such as copper, gold, silver, aluminum and other metals or carbon nanotubes, graphene, ITO and other non-metals, by magnetron sputtering, thermal evaporation, electroplating, silver glue, etc. In this way, the assembly of a self-powered gas sensor based on single-walled carbon nanotubes is completed. The invention realizes the preparation of a small, light, high-performance self-powered gas sensor, and can further integrate a flexible and bendable self-powered gas sensor through optimized design, breaking through the current metal oxide gas sensor in terms of flexibility, weight, energy consumption, Energy supply and other limitations.

Description

technical field [0001] The invention relates to gas sensor technology, specifically a high-performance gas sensor constructed by using single-wall carbon nanotube flexible transparent film, and a (including flexible) self-powered gas sensor constructed by single-wall carbon nanotube film / silicon heterojunction solar photovoltaic cells method of preparation. Background technique [0002] In recent years, with the rapid development of science and technology, sensor technology has made rapid progress in both accuracy and breadth. However, traditional sensors are still difficult to meet the huge demands of IoT (Internet of Things) technology, and new sensor technologies are in urgent need of breakthroughs. Self-powered sensors are an emerging sensing technology. [0003] According to the way of energy supply, micro sensors can be divided into two types: active and passive sensors. Although the active sensor is powered by a power supply or a circuit, the control process is fle...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N27/00H01L31/028H01L31/074
CPCG01N27/00H01L31/074H01L31/028Y02E10/547
Inventor 刘畅郭舒予胡显刚侯鹏翔成会明
Owner INST OF METAL RESEARCH - CHINESE ACAD OF SCI
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