Sampling device for gas concentration measurement

Abstract

The invention discloses a sampling device for gas concentration measurement. The device comprises a pressure container, a nitrogen cylinder, a hydrogen cylinder, a hydrogen measuring system, a chromatograph and a deionized water tank, one side of the pressure container is communicated with the nitrogen cylinder, and one side of the pressure container is also communicated with the hydrogen cylinder; and four sampling probes are arranged in the pressure container, each sampling probe comprises a sampling tube, a joint, a sampling head and an anti-spray cover, the anti-spray cover is connected tothe surface of the sampling tube in a sleeving manner, and the bottom end of the sampling tube is fixedly connected with the top end of the joint. Concentration parameters of hydrogen in sampled gasare detected through the hydrogen measuring system, meanwhile, the hydrogen concentration in the sampled gas is detected through the chromatograph, and the precision of the sampling device is obtainedaccording to comparison results of four pairs of hydrogen concentrations in the hydrogen measuring system and the chromatograph.

Description

technical field [0001] The invention belongs to the technical field of gas concentration measurement, in particular to a sampling device for gas concentration measurement. Background technique [0002] With the development of electronic technology, the requirements for the packaging process of electronic devices are becoming more and more stringent. When there is a "hydrogen effect" in the packaging process, it will change the performance of the device, cause the device to work abnormally, and cause the device to fail. shorten the service life of the device. In order to solve the problem of the hydrogen effect of the device, it is necessary to quickly evaluate the ability of the device to resist "hydrogen poisoning". [0003] At present, the gas concentration detection is mainly carried out by setting the gas concentration detection sensor. Due to the high temperature and high pressure environment, the gas concentration detection sensor is easy to be damaged, and when the c...

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Problems solved by technology

[0003] At present, the gas concentration detection is mainly carried out by setting the gas concentration detection sensor. Due to the high temperature and high pressure environment, the gas concentration detection sensor is easy to be damaged, and when the comparison error of the gas concentration detection sensor's multiple detection results is small, it is difficult to judge the gas concentration itself. If there is a change or the gas concentration detection sensor is faulty, it is impossible to obtain accurate gas concentration detection results

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