In-situ surface shape splicing measurement device and method for large-aperture planar optical element

Abstract

In order to solve the technical problems that the existing scheme for measuring the surface shape of the large-aperture planar optical element is easily influenced by air flow disturbance and vibration, the measurement dynamic range is small, the surface shape measurement resolution is not high, the scheme cannot be applied to surface shape measurement of various postures in place, and measurementcannot be performed when Power exists in the surface shape of the large-aperture planar optical element, the invention provides an in-situ surface shape splicing measurement device and method for a large-aperture plane optical element. A laser, a semi-transparent semi-reflective mirror, a collimator objective, a diaphragm, a small-hole diaphragm, a collimator eyepiece, a binary optical device, adetector, an attenuation plate, a far-field detector, a drive controller, an electric control diaphragm, a reflector array, a pyramid prism array and a six-degree-of-freedom motion platform are utilized, the dynamic high-precision surface shape splicing measurement of the measured large-aperture planar optical element under various postures is realized, and the measurement precision is not influenced by the external environment.

Description

technical field [0001] The invention belongs to the field of optics, and relates to a large-caliber plane optical element surface shape measuring device and a method thereof. The large-aperture planar optical element mentioned in the present invention refers to a planar optical element with an aperture larger than 300 mm. Background technique [0002] Large-aperture planar optical components are mainly used in astronomical telescopes, high-power laser inertial confinement fusion and other devices. Since the large-aperture planar optical element is in a tilted working posture, the surface shape will be affected by factors such as gravity, supporting fixtures, and adjustment status, and will be deformed, which will seriously affect the stability of the device and the wavefront quality of the output beam. Therefore, it is of great significance to realize the measurement of the in-situ surface shape of large-aperture planar optical elements, and adjust the posture or support fi...

AI Technical Summary

Problems solved by technology

[0006] In order to solve the problem that the existing schemes for measuring the surface shape of large-aperture planar optical elements are easily affected by air flow disturbance and vibration, the measurement dynamic range is small, the resolution of surface shape measurement is not high, and it cannot be applied to various attitude and surface shape measurements in situ. As well as the technical problem that it cannot be measured when there is Power in the surface shape of the large-diameter plane optical element, the present invention proposes a large-diameter plane optical element splicing measurement device and method, which can realize the large-diameter plane optical element in-situ Dynamic and high-precision measurement of surface shape under various attitudes, especially the in-position surface shape measurement of planar optical elements with large power, and the measurement accuracy is not affected by the external environment (air flow disturbance, vibration, etc.)

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