Looking for breakthrough ideas for innovation challenges? Try Patsnap Eureka!

Device and method for in-plane shape splicing measurement of large-aperture planar optical elements

A technology of optical components and measuring devices, which is applied in the field of optics, can solve the problems of being easily affected by air flow disturbance and vibration, low resolution of surface shape measurement, and small dynamic range of measurement, etc. Less, repeatable effect

Active Publication Date: 2021-11-16
XI'AN INST OF OPTICS & FINE MECHANICS - CHINESE ACAD OF SCI
View PDF0 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] In order to solve the problem that the existing schemes for measuring the surface shape of large-aperture planar optical elements are easily affected by air flow disturbance and vibration, the measurement dynamic range is small, the resolution of surface shape measurement is not high, and it cannot be applied to various attitude and surface shape measurements in situ. As well as the technical problem that it cannot be measured when there is Power in the surface shape of the large-diameter plane optical element, the present invention proposes a large-diameter plane optical element splicing measurement device and method, which can realize the large-diameter plane optical element in-situ Dynamic and high-precision measurement of surface shape under various attitudes, especially the in-position surface shape measurement of planar optical elements with large power, and the measurement accuracy is not affected by the external environment (air flow disturbance, vibration, etc.)

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Device and method for in-plane shape splicing measurement of large-aperture planar optical elements
  • Device and method for in-plane shape splicing measurement of large-aperture planar optical elements
  • Device and method for in-plane shape splicing measurement of large-aperture planar optical elements

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0074] The present invention will be further described below in conjunction with accompanying drawing.

[0075] Such as figure 1 As shown, the large-aperture planar optical element provided by the present invention is an in-plane shape splicing measurement device, including an image data processing unit (not shown in the figure), a six-degree-of-freedom motion platform 18, and a six-degree-of-freedom motion platform 18 The laser 1, the first half mirror 2, the collimating objective lens 3, the second half mirror 4, the diaphragm 5, the third half mirror 7, the aperture diaphragm 8 with an aperture less than 1mm, Collimating eyepiece 9 , binary optical device 10 , detector 11 , attenuation plate 12 , far-field detector 13 , drive controller 14 , electric control diaphragm 15 , mirror array 16 and corner cube array 17 .

[0076] The first half-mirror 2, the collimating objective lens 3, the second half-mirror 4, the diaphragm 5 and the measured large-aperture planar optical ele...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

In order to solve the problem that the existing solutions for measuring the surface shape of large-diameter planar optical components are easily affected by air flow disturbance and vibration, the measurement dynamic range is small, the surface shape measurement resolution is not high, and it cannot be applied to in-situ surface shape measurement of various attitudes. And the technical problem that cannot be measured when there is Power in the surface shape of the large-diameter plane optical element, the present invention proposes a large-diameter plane optical element in-position surface shape splicing measurement device and method, using lasers, half mirrors, Straight objective lens, diaphragm, pinhole diaphragm, collimating eyepiece, binary optics, detector, attenuation plate, far-field detector, drive controller, electronic diaphragm, mirror array, corner prism array, six The degree of freedom motion platform realizes the dynamic and high-precision surface splicing measurement of the measured large-diameter flat optical components in various postures, and the measurement accuracy is not affected by the external environment.

Description

technical field [0001] The invention belongs to the field of optics, and relates to a large-caliber plane optical element surface shape measuring device and a method thereof. The large-aperture planar optical element mentioned in the present invention refers to a planar optical element with an aperture greater than 300mm. Background technique [0002] Large-aperture planar optical components are mainly used in astronomical telescopes, high-power laser inertial confinement fusion and other devices. Since the large-aperture planar optical element is in a tilted working posture, the surface shape will be affected by factors such as gravity, supporting fixtures, and adjustment status, and will be deformed, which will seriously affect the stability of the device and the wavefront quality of the output beam. Therefore, it is of great significance to realize the measurement of the in-situ surface shape of large-aperture planar optical elements, and adjust the posture or support fi...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/24G06F17/14G06T7/62G06T7/66G06T7/73G06T17/20
CPCG01B11/2441G06F17/142G06T17/20G06T7/62G06T7/66G06T7/73
Inventor 段亚轩达争尚陈晓义袁索超范尧李铭王璞
Owner XI'AN INST OF OPTICS & FINE MECHANICS - CHINESE ACAD OF SCI
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Patsnap Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Patsnap Eureka Blog
Learn More
PatSnap group products