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Vacuum auxiliary heating cabin for coating machine

A vacuum-assisted coating machine technology, which is applied in vacuum evaporation coating, sputtering coating, ion implantation coating, etc., can solve the problems of increasing vacuuming time, occupying a large area, and increasing manufacturing costs due to large volume. Reduce cabin space and evenly heat the effect

Pending Publication Date: 2021-04-02
DONGGUAN HUICHENG VACUUM TECH
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] Existing auxiliary cabins such as heating cabins are similar to cylinders. The workpiece rotates while revolving on a horizontal circular orbit in the heating cabin. The larger volume of the cylinder cabin increases the manufacturing cost and increases the Vacuuming time is short, and it occupies a large area

Method used

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  • Vacuum auxiliary heating cabin for coating machine
  • Vacuum auxiliary heating cabin for coating machine
  • Vacuum auxiliary heating cabin for coating machine

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Embodiment Construction

[0026] Further description below in conjunction with accompanying drawings.

[0027] figure 1 It is an external schematic diagram of a square heating cabin according to an embodiment of the present invention, which shows the structure of a square cabin from a three-dimensional perspective.

[0028] figure 2 It is a schematic diagram of the interior of the square heating cabin. It shows that the square heating cabin is made up of frame 1, long circular track 3 and heating cabin 4. Similar to the side track of a football field, the long circular track 3 composed of two parallel symmetrical straight lines and two semicircular arcs is fixed on the long circular track fixing seat 2 by screws, and the long circular track fixing seat 2 is fixed on the heating cabin 4 by screws On the bottom plate, the heater 5 is fixed on the side wall of the cabin body through the heater fixing part 6, the temperature measuring probe 7 is fixed next to the heating pipe of the heater 5, and the c...

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Abstract

A vacuum auxiliary heating cabin for a coating machine is characterized in that a heating cabin (4) is a hexahedral cuboid and is provided with a hexahedral cuboid-shaped inner cavity, and the bottomsurface of the inner cavity is provided with a long annular track (3) formed by connecting two symmetrical parallel straight lines and semi-circular arcs at two ends; a corresponding long annular chain driving mechanism is arranged in the long annular rail, a corresponding long annular fixed inner gear ring is arranged on the long annular rail, a sliding block seat (3-10) is supported on the longannular rail in a sliding mode, and the inner side of the sliding block seat is connected with a chain (3-13) and driven to revolve on the long annular rail. A rotating rod (3-7) capable of hanging aworkpiece (3-8) is rotatably and vertically supported on the sliding block seat, and an autorotation gear (3-5) is fixed to the lower portion of the rotating rod and meshed with the long annular fixedinner gear ring to enable the long annular fixed inner gear ring to achieve autorotation during revolution. The size of the cabin is small, the manufacturing cost is reduced, the vacuumizing time isshortened, and the occupied area is reduced.

Description

technical field [0001] The invention relates to a vacuum auxiliary heating cabin for a coating machine, in particular to a cuboid vacuum auxiliary heating cabin with a long circular track. Background technique [0002] In recent years, in order to improve the coating efficiency, a variety of multi-chamber coating machines have appeared. Each cabin of these multi-chamber coating machines can realize the functions of different stages of the coating process at the same time, such as feeding cabin, heating cabin, ion etching cabin, coating cabin, cooling discharge cabin, etc. The design of these independent functional cabins saves the auxiliary time of vacuum breaking and vacuuming, and independently performs heating, ion etching, coating, cooling and other operations in each cabin, greatly improving production efficiency and equipment capacity, and coating The chamber is always in a vacuum state, which reduces the impact of gas filling when the vacuum is broken, and improves t...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/56C23C14/02C23C14/50
CPCC23C14/02C23C14/505C23C14/568
Inventor 李志方曾琨魏先进张明辉李玉婷
Owner DONGGUAN HUICHENG VACUUM TECH
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