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A tin drop detection and recovery device

A recovery device and tin drop technology, which is applied in the field of lithography machines, can solve the problems of tin drop emission angle deviation, affecting the performance of EUV lithography machines, affecting the efficiency of lithography machines, etc., and achieve the effect of improving the recycling rate

Active Publication Date: 2022-06-28
SHANGHAI INTEGRATED CIRCUIT EQUIP & MATERIALS IND INNOVATION CENT CO +1
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] but in the attached figure 1 In the existing structure described above, when the spout of the tin droplet is blocked by semi-solidified residual tin or the accumulation of impurities in the tin, the emission angle of the tin droplet will be shifted, and the deflected tin droplet cannot be accurately detected by the pulsed laser. 1 focus, it will not be able to effectively produce extreme ultraviolet radiation, which will affect the performance of the entire EUV lithography machine; and the deflection of tin droplets in the prior art cannot be detected in time, and it is often necessary to wait until the performance of the lithography machine is abnormal. Detect and correct in time, which seriously affects the efficiency of the lithography machine

Method used

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  • A tin drop detection and recovery device
  • A tin drop detection and recovery device
  • A tin drop detection and recovery device

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Embodiment 1

[0040] like Figure 4 As shown, there are four piezoelectric ceramics in the tin drop detector. The position of the tin drop is determined by the voltage value of the piezoelectric ceramics. The piezoelectric ceramics are sandwiched at four corners by an extremely thin stainless steel plate and a substrate. like Figure 4 shown. According to the possible positions of three kinds of tin droplets, the principle of piezoelectric ceramic detection and tin droplet nozzle position adjustment is explained. The whole stainless steel plate is divided into four parts, namely A, B, C, and D. The piezoelectric ceramics pass through the preamplifier. The measured voltage signals are V A , V B , V C , V D :

[0041] When the tin drop is in position 1: V A 1 =V B 1 =V C 1 =V D 1 , indicating that the tin drop is just in the center of the square composed of four piezoelectric ceramics, so there is no need to adjust the tin drop nozzle.

[0042] When the tin drop is in position ...

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Abstract

The invention discloses a tin drop detection and recovery device, which comprises a tin drop emitter, a tin drop recovery device and a tin drop receiver, wherein the tin drop emitter is used to emit tin drop by drop, and the tin drop passes through the tin drop The rebound of the drop receiver arrives in the tin drop recycler; the tin drop receiver includes a substrate, a receiving plate positioned below the substrate, and piezoelectric ceramics between the substrate and the receiving plate, and the piezoelectric ceramics are evenly distributed on the Around the base plate and the receiving plate, the base plate and the receiving plate are center-symmetric figures; the tin drop emitter and the tin drop collector are symmetrically located on both sides of the central normal line of the tin drop receiver. The tin droplet detection and recovery device provided by the invention can ensure that the tin droplet emitted by the tin droplet emitter will not deviate.

Description

technical field [0001] The invention belongs to the field of photolithography machines, in particular to a tin drop detection and recovery device. Background technique [0002] At present, the mainstream extreme ultraviolet (Extremely Ultra-Violet, EUV) lithography machine adopts a laser-excited plasma (Laser Produced Plasma, LPP) light source, and the target material adopts tin (Sn). as attached figure 1 As shown, in the existing lithography machine, tin is heated to a molten state by a heating device and is ejected drop by drop by a tin droplet emitter 8 . The pulsed laser 1 (usually carbon dioxide gas laser) is focused into a pulsed laser beam 2 through a focusing lens, and the pulsed laser beam 2 is focused on the tin droplet 3, and the tin droplet is heated to a plasma state to generate extreme ultraviolet radiation 11 including 13.5 nm. The spray frequency of tin droplets is generally 50-200kHz, and the speed of tin droplets is usually ≥30m / s, which is synchronized w...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H05G2/00
CPCH05G2/00
Inventor 李艳丽伍强
Owner SHANGHAI INTEGRATED CIRCUIT EQUIP & MATERIALS IND INNOVATION CENT CO
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