Tin drop detection and recovery device
A recycling device and tin drop technology, applied in the field of lithography machines, can solve the problems of tin drop emission angle deviation, affecting the efficiency of lithography machines, unable to effectively generate extreme ultraviolet radiation, etc., to achieve the effect of improving the recycling rate
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Example Embodiment
[0039]Example 1
[0040]Such asFigure 4As shown, there are four piezoelectric ceramics in the tin drop detector, and the position of the tin droplets is determined by the voltage value of the piezoelectric ceramic, and the piezoelectric ceramics are electrically thinned and the substrate is sandwiched in four angles. Such asFigure 4Indicated. For the position of three tin drops, the principle of piezoelectric ceramic detection and the position adjustment of the tin droplets are described, including the entire stainless steel plate being four parts, respectively, B, C, D, piezoelectric ceramics pass the preamplifier The measured voltage signal is VA, VB, VC, VD:
[0041]When tin drop is in position 1: VA1= VB1= VC1= VD1It is illustrated that tin droplets are in a square center consisting of four piezoelectric ceramics, there is no need to adjust the tin jet.
[0042]When tin drop is in position 2: VA2> VB2= VC2= VD2It is illustrated that tin droplets are biased towards one of the piezoelectri...
PUM
Abstract
Description
Claims
Application Information
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic.
© 2023 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap