Friction nano-generator based on micro electro mechanical system and preparation method of friction nano-generator
A nano-generator, micro-electromechanical system technology, applied in the direction of triboelectric generator, can solve the problem of unstable output signal, and achieve the effect of improving stability, enhancing integration and reducing volume
Active Publication Date: 2021-05-04
苏州慧闻纳米科技有限公司
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[0006] An object of the present invention is to solve the problem of unstable output signal of the triboelectric nanogenerator in the prior art
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[0062] see Figure 1 to Figure 3 , the MEMS-based triboelectric nanogenerator 100 of the present invention is mainly composed of a substrate 10, a friction layer 20, electrodes and wires. Wherein, a vacuum cavity 23 is defined in the friction layer 20, and the triboelectric nanogenerator 100 rubs in the vacuum cavity 23, so that the friction occurs in a vacuum environment, so that the output of the electrical signal of the triboelectric nanogenerator 100 is not affected by the external environment , improving the stability of the output signal of the triboelectric nanogenerator 100 .
[0063] The friction layer 20 can be compounded on the substrate 10. The friction layer 20 is mainly composed of a first friction body 21 and a second friction body 22 connected by bonding. Using micro-electromechanical processing technology, the first friction body 21 and the second friction body 22 The friction layer 20 is formed by direct bonding technology, and the first friction body 21 and...
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The invention provides a friction nano-generator based on a micro electro mechanical system and a preparation method thereof. The friction nano-generator comprises: a substrate; a friction layer, wherein a vacuum cavity is defined in the friction layer, the friction layer is arranged on the substrate, the friction layer comprises a first friction body and a second friction body which are connected in a bonding mode, the vacuum cavity is defined between the first friction body and the second friction body, and the friction layer is configured in the mode that when external incident sound wave energy is transmitted to the second friction body, the second friction body is driven to vibrate in the vacuum cavity, and an electric signal is generated after the second friction body makes contact with the first friction body; electrodes respectively arranged on the substrate and the friction layer to form a bottom electrode and a top electrode; and a conducting wire connected with the bottom electrode and the top electrode to export an electric signal. According to the friction nano-generator, the vacuum cavity is formed in the friction layer, so that friction occurs in a vacuum environment, and the stability of an output signal of the friction nano-generator is improved.
Description
technical field [0001] The invention relates to the technical field of friction nanogenerators, in particular to a microelectromechanical system-based friction nanogenerator and a preparation method thereof. Background technique [0002] Based on the principles of triboelectrification and electrostatic induction, triboelectric nanogenerators can convert mechanical energy into electrical signals. Due to the characteristic of high output voltage, triboelectric nanogenerators are widely used in highly sensitive mechanical sensing devices. However, the traditional preparation methods of triboelectric nanogenerators greatly limit its miniaturization and integration, which in turn limits the commercialization of future products based on triboelectric nanogenerators. [0003] At present, all triboelectric nanogenerators are prepared by hand. This preparation method brings several problems: first, the production efficiency is low; second, the device size will be relatively large; t...
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IPC IPC(8): H02N1/04
CPCH02N1/04
Inventor 孙旭辉陈晨文震
Owner 苏州慧闻纳米科技有限公司