A kind of preparation method of high transmittance anti-fog coating and laparoscope
A high light transmittance, anti-fog coating technology, applied in coatings, metal material coating technology, surgery, etc., can solve problems such as few researches, achieve elimination of diffuse scattering, increase visible light transmittance, and maintain transparency sexual effect
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Embodiment 1
[0017] The laparoscopic lens is used as the substrate, and the substrate is pretreated. The pretreatment includes grinding, degreasing, cleaning and drying. Among them, 400#, 600# and 800# sandpaper are used for grinding, and 15% of the oil is used for degreasing. Sodium carbonate + 10% sodium hydroxide solution, cleaning with deionized water and ultrasonic cleaning, drying in a protective atmosphere (such as N 2 ) under.
[0018] Put the dried substrate into a magnetron sputtering coating machine, use the AlSi composite target (the atomic content of Si in the composite target is 15%) as the sputtering source, oxygen and argon as the reaction gases, and Sputtering deposited Al on the bottom surface 2 o 3 +SiO2 2 Composite coating. Among them, oxygen accounts for 40% of the total gas, and the background vacuum is 5×10 -5 Pa, oxygen flow rate 20sccm, argon flow rate 30sccm, substrate temperature 200°C, sputtering pressure 2.0Pa, sputtering power 80W.
[0019] to Al 2 o 3...
Embodiment 2
[0022] The laparoscopic lens is used as the substrate, and the substrate is pretreated. The pretreatment includes grinding, degreasing, cleaning and drying. Among them, 400#, 600# and 800# sandpaper are used for grinding, and 15% of the oil is used for degreasing. Sodium carbonate + 10% sodium hydroxide solution, cleaning with deionized water and ultrasonic cleaning, drying in a protective atmosphere (such as N 2 ) under.
[0023] Put the dried substrate into a magnetron sputtering coater, use the AlSi composite target (the atomic content of Si in the composite target is 22%) as the sputtering source, and oxygen and argon as the reaction gases. Sputtering deposited Al on the bottom surface 2 o 3 +SiO2 2 Composite coating. Among them, oxygen accounts for 40% of the total gas, and the background vacuum is 5×10 -5 Pa, oxygen flow rate 20sccm, argon flow rate 30sccm, substrate temperature 200°C, sputtering pressure 2.0Pa, sputtering power 80W.
[0024] to Al 2 o 3 +SiO2 2...
Embodiment 3
[0027] The laparoscopic lens is used as the substrate, and the substrate is pretreated. The pretreatment includes grinding, degreasing, cleaning and drying. Among them, 400#, 600# and 800# sandpaper are used for grinding, and 15% of the oil is used for degreasing. Sodium carbonate + 10% sodium hydroxide solution, cleaning with deionized water and ultrasonic cleaning, drying in a protective atmosphere (such as N 2 ) under.
[0028] The dried substrate was put into a magnetron sputtering coating machine, the AlSi composite target (the atomic content of Si in the composite target was 27%) was used as the sputtering source, and oxygen and argon were used as the reaction gases. Sputtering deposited Al on the bottom surface 2 o 3 +SiO2 2 Composite coating. Among them, oxygen accounts for 40% of the total gas, and the background vacuum is 5×10 -5 Pa, oxygen flow rate 20sccm, argon flow rate 30sccm, substrate temperature 200°C, sputtering pressure 2.0Pa, sputtering power 80W.
...
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