MEMS piezoresistive acceleration sensor chip with distributed mass block structure

Abstract

The invention discloses an MEMS piezoresistive acceleration sensor chip with a distributed mass block structure. The MEMS piezoresistive acceleration sensor chip comprises a siliceous substrate and a shed glass body, four suspended mass blocks are arranged in the siliceous substrate; the four suspended mass blocks are connected through the four torsion beams to form a square; the torsion beam is flush with the face, facing the greenhouse glass body, of the suspended mass block, the torsion beam is located on the central axis of the suspended mass block. The four suspended mass blocks face the two opposite inner side walls of the siliceous substrate and are connected with the inner side walls of the siliceous substrate through four supporting beams correspondingly. The four suspended mass blocks face the other two opposite inner side walls of the siliceous substrate and are connected with the inner side walls of the siliceous substrate through four sensitive beams respectively. The supporting beam, the sensitive beam and the face, away from the shed glass body, of the suspended mass block are flush, and the supporting beam and the sensitive beam are located on the central axis of the suspended mass block. According to the invention, transverse cross interference of the sensor can be eliminated theoretically, processing is easier, and batch production is facilitated.

Description

technical field [0001] The invention relates to the technical field of micro-acceleration sensor chips, and more specifically relates to a distributed mass structure MEMS piezoresistive acceleration sensor chip. Background technique [0002] MEMS piezoresistive acceleration sensor, as the earliest developed silicon micro-accelerometer, has the advantages of simple structure, low power consumption and wide operating frequency range. , the sensitivity is high, but the large lateral cross-interference and low natural frequency lead to the structure of the sensor can not be applied to the design of high-performance piezoresistive acceleration sensor. In subsequent studies, sensitive structures such as double cantilever beam structures, bridge structures, cross beams, and composite multi-beam structures have been proposed one after another, all of which aim to improve the comprehensive performance of the beam-mass structure. The double cantilever beam structure arranges the cant...

AI Technical Summary

Problems solved by technology

[0004] (1) Although the lateral cross-interference of sensors can be improved by rational arrangement of beams, it cannot contain the lateral cross-interference of sensors from the source

[0005] (2) Sensitivity and natural frequency of the sensor are a pair of parameters that restrict each other. The aforementioned research can make the sensor have a higher natural frequency and measurement sensitivity through the optimization design of the sensitive structure, but the joint improvement of sensitivity and natural frequency cannot be achieved.

Images