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Electrostatic state capacity shape change detector

A technology of capacity and state, applied in the direction of measuring devices, instruments, etc., can solve the problems of lowering accuracy, lowering detection accuracy, etc., and achieve the effect of reducing production cost, keeping accuracy and resolution unchanged, and being widely used

Pending Publication Date: 2021-05-28
艾极倍特(上海)半导体设备有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0002] Capacitive displacement meters are currently used to measure the dielectric constant, displacement, and thickness in the detection of capacitance and shape changes in the electrostatic state, but in principle, there are the following problems. In addition to the detection surface, the electrode surface (side, back) and the electrode and the control unit The cables between are also part of the electrodes, and they are affected by floating capacitance, which leads to reduced accuracy, if the electrodes are surrounded by ground, the electrodes and the control unit are connected to the coaxial cable, and the outer conductor It is grounded, and the floating capacitor can be cut off, but the new inter-electrode and the outside of the shell and the coaxial cable will cause a large amount of distributed capacitance between the conductor and the internal conductor, thereby reducing the detection accuracy. Therefore, we propose a capacitive shape variation detection in electrostatic state

Method used

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  • Electrostatic state capacity shape change detector

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Embodiment 1

[0017] see figure 1 , the present invention provides a technical solution: a detection of capacitance shape variation in an electrostatic state, the detection of capacitance shape variation in an electric state includes a cylindrical outer cylinder, and the cylindrical outer cylinder is slidably loaded with a metal sliding shaft, and an outer tube is slidably connected to the sliding shaft, and a sampling circuit is arranged outside the outer tube.

[0018] Preferably, an output device, an electrode and a protective pole are arranged outside the sliding shaft, and the electrode is surrounded by an electrode guard.

[0019] Preferably, a coaxial cable is arranged outside the cylindrical outer cylinder, and a follower amplifier and a driver are arranged outside the output device.

[0020] A capacitance shape variation detection in an electrostatic state, the capacitance shape variation detection in an electrostatic state includes the following steps:

[0021] S1: The outer tub...

Embodiment 2

[0027] A capacity shape variation detection in an electrostatic state, the capacitance shape variation detection in an electric state includes a cylindrical outer cylinder, the cylindrical outer cylinder is slidably loaded with a metal sliding shaft, and the sliding shaft is slidably connected There is an outer tube, and a sampling circuit is arranged outside the outer tube, an output device, an electrode and a protective pole are arranged outside the sliding shaft, an electrode guard is surrounded on the outside of the electrode, and a coaxial cable is arranged outside the cylindrical outer cylinder , and the output device is provided with a follower amplifier and a driver.

[0028] A capacitance shape variation detection in an electrostatic state, the capacitance shape variation detection in an electrostatic state includes the following steps:

[0029] S1: The outer tube is near the outer circumference of the sliding shaft. The capacitance-voltage conversion circuit converts...

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Abstract

The invention discloses an electrostatic state capacity shape change detector, which comprises a cylindrical outer cylinder. A metal sliding shaft is slidably mounted in the cylindrical outer cylinder, an outer tube is slidably connected outside the sliding shaft, a sampling circuit is arranged outside the outer tube, and an output end, an electrode and a protective electrode are arranged outside the sliding shaft. A longer measurement stroke can be manufactured, the precision and the resolution ratio are not changed, the manufacturing cost is greatly reduced, the control unit and the electrode unit can be separated in the following minutes, and the protective electrode can eliminate stray capacitance and distributed capacitance that may be possessed by the electrode directivity to detect surrounding electrodes, the electrode and protective electrode only structures, the shapes of rollers such as cylindrical outer tubes, and the like can be free shapes, and in addition, the accuracy is not reduced due to resistors of semiconductors and dielectrics added in series and parallel to the detected capacitance, and the application range can be effectively expanded.

Description

technical field [0001] The invention relates to the technical field of capacitance shape variation detection, in particular to a capacitance shape variation detection in an electrostatic state. Background technique [0002] Capacitive displacement meters are currently used to measure the dielectric constant, displacement, and thickness in the detection of capacitance and shape changes in the electrostatic state, but in principle, there are the following problems. In addition to the detection surface, the electrode surface (side, back) and the electrode and the control unit The cables between are also part of the electrodes, and they are affected by floating capacitance, which leads to reduced accuracy, if the electrodes are surrounded by ground, the electrodes and the control unit are connected to the coaxial cable, and the outer conductor It is grounded, and the floating capacitor can be cut off, but the new inter-electrode and the outside of the shell and the coaxial cable...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01D21/02
CPCG01D21/02
Inventor 黄澄珵黄新生
Owner 艾极倍特(上海)半导体设备有限公司
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