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Isobaric partition adsorption workbench

A workbench and work platform technology, which is applied to the photoengraving process of the pattern surface, the exposure device of the photoengraving process, optics, etc., can solve the problems of PCB board failure and adsorption, and achieve the effect of the best suction cup partition effect.

Pending Publication Date: 2021-05-28
无锡影速半导体科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] In order to solve the problem that the PCB board cannot be firmly and smoothly adsorbed on the workbench of the lithography machine in the above-mentioned existing lithography process, the present invention provides an isobaric partition adsorption workbench, the isobaric partition The adsorption workbench includes from top to bottom: the worktable surface, the main body of the working platform and the vacuum assembly; wherein, the main body of the working platform is divided into a plurality of concave areas, and the concave areas are divided by protruding steps to form multiple Working area; the working surface is located above the main body of the working platform, and the two are in close contact; the bottom surface of each concave area is provided with vacuum through holes;

Method used

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  • Isobaric partition adsorption workbench

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Embodiment 1

[0027] This embodiment provides an isobaric partition adsorption workbench. The isobaric partition adsorption workbench comprises from top to bottom: a worktable surface, a work platform main body and a vacuum assembly; wherein, the work platform main body is divided into a plurality of concave In the lower area, the concave areas are divided by protruding steps to form multiple working areas; the working table is located above the main body of the working platform, and the two are in close contact; the bottom surface of each concave area is equipped with vacuum through holes;

[0028] There are several through holes on the working table;

[0029] The vacuuming component includes a vacuuming pipeline and a plurality of vacuuming covering control components, and the vacuuming covering control component is used to control the vacuuming on and off of each working area;

[0030] The vacuum covering control assembly is located below the main body of the working platform; the two ar...

Embodiment 2

[0032] This embodiment provides an isobaric partition adsorption workbench, see figure 1 , figure 1 The schematic diagram of the working table and the main body of the working platform in the isobaric partition adsorption workbench provided for this application; 1.3 and 1.4. A working platform 2 is arranged above the working platform main body 1. The working platform main body 1 and the working platform 2 are in close contact. A plurality of independent spaces are formed by designing a concave area on the platform main body 1. Each independent concave area passes through a protruding The steps are divided, and each divided step is in close contact with the work surface 2 to ensure that no gas passes through; the bottom surface of each concave area is provided with a plurality of vacuum through holes 1.11, 1.21, 1.31 and 1.41.

[0033] The working surface 2 is provided with a plurality of through holes 2.1 for absorbing PCB boards.

[0034] Below the main body 1 of the worki...

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Abstract

The invention discloses an isobaric partition adsorption workbench, and belongs to the technical field of exposure equipment. By arranging independent vacuumizing co-pressure cavities and communicating the vacuumizing co-pressure cavities corresponding to all the working areas through vacuumizing pipelines, all the independent working areas are located in the same cavity in the vacuumizing state to form the co-pressure cavity, and therefore co-pressure of all the independent working areas in the negative pressure state is guaranteed; the problem that in the prior art, all independent working areas are different in pressure in the negative pressure state is solved. A vacuumizing control air cylinder is arranged to control the vacuumizing covering control assembly to be switched on and switched off, and an optimal suction cup partitioning effect is achieved.

Description

technical field [0001] The invention relates to an isobaric partition adsorption workbench, which belongs to the technical field of exposure equipment. Background technique [0002] During the lithography process of the PCB board, the worktable of the lithography machine fixes the PCB board by means of negative pressure adsorption. However, there are size differences between the PCB boards of each batch, and the working surface of the lithography machine needs to have a larger size in order to adapt to larger-sized PCB boards. [0003] When the size of the PCB board placed on the lithography machine workbench is small, the worktable of the lithography machine is covered by the PCB board and the leakage area is large, and there will be air leakage, which makes the overall adsorption of the lithography machine workbench The negative pressure value is reduced, so that the adsorbed PCB board cannot be firmly and smoothly adsorbed on the workbench of the lithography machine, and...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G03F7/20H05K3/06
CPCG03F7/20G03F7/707G03F7/70716H05K3/06
Inventor 肖燕青曾振军何伟陈海巍王方江
Owner 无锡影速半导体科技有限公司
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