A vertical exposure and detection device
A detection device and exposure device technology, which is applied in photolithography exposure devices, microlithography exposure equipment, optics, etc., can solve the problems of low work efficiency, easy to adhere to dust, inconvenient use, etc., and achieve high work stability and shorten Detection time, wear reduction effect
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[0024] In order to facilitate the understanding of those skilled in the art, the present invention will be further described below with reference to the embodiments and the accompanying drawings, and the contents mentioned in the embodiments are not intended to limit the present invention. The present invention will be described in detail below with reference to the accompanying drawings.
[0025] A vertical exposure and detection device, such as Figure 1 to Figure 5 As shown, it includes a frame 1, an exposure device 3, a film detection device, and a vertical conveying mechanism 4 for conveying materials perpendicular to the frame 1, which are all installed on the frame 1. The material conveyed by the vertical conveying mechanism 4 is exposed through the exposure device 3; the film detection device includes a lafilin mechanism 5 for pulling out the film and a film detection mechanism 6 for detecting the film; the exposure The device 3 is vertically arranged on the frame 1; ...
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