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Wafer box carrying robot

A technology for handling robots and wafer cassettes, applied in manipulators, manufacturing tools, etc., can solve the problems of low handling efficiency, inconvenient handling of wafer cassette handling robots, and easy handling accidents, so as to improve the overall handling performance and reduce the Risk of damage and contamination, effect of easy holding

Pending Publication Date: 2021-06-11
SHENZHEN YOUIBOT ROBOTICS CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0009] The object of the present invention is to provide a wafer box handling robot, which aims to solve the technical problems of the existing wafer box handling robot, such as inconvenient gripping, low handling efficiency, and prone to handling accidents.

Method used

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Embodiment Construction

[0063] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without creative efforts fall within the protection scope of the present invention.

[0064] It should be noted that all directional indications (such as up, down, left, right, front, back...) in the embodiments of the present invention are only used to explain the relative positional relationship and movement conditions between the various components in a certain posture , if the specific posture changes, the directional indication also changes accordingly.

[0065] It should also be noted that when an element is referred to as being ...

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Abstract

The invention relates to the technical field of wafer carrying, and particularly discloses a wafer box carrying robot. The wafer box carrying robot comprises an automatic guided vehicle, a supporting device, a wafer box bearing device arranged on the automatic guided vehicle and a mechanical arm used for driving the supporting device to move; the supporting device is used for supporting a wafer box, wherein supporting handles are arranged on the two opposite sides of the wafer box in a protruding mode correspondingly, the supporting device comprises two supporting arms and a connecting arm, the two supporting arms are oppositely arranged in a spaced mode and used for supporting the two supporting handles in a one-to-one mode correspondingly, and the connecting arm is connected between the two supporting arms; the wafer box bearing device comprises a seat body mounted on the automatic guided vehicle and a bearing platform arranged on the seat body; at least one containing groove for bearing the wafer box is formed in the bearing platform; and one end of the mechanical arm is connected with the seat body, and the other end of the mechanical arm is connected with the supporting device so that the supporting device can support the wafer box into the containing groove or take the wafer box out of the containing groove. The wafer box carrying robot has the advantages of being convenient to support the wafer box, good in controllability, high in reliability, high in carrying efficiency and the like.

Description

technical field [0001] The invention relates to the field of wafer handling, in particular to a wafer box handling robot. Background technique [0002] Wafers have the characteristics of thin thickness, light weight, high brittleness and high requirements for environmental cleanliness. In order to reduce the risk of wafer contamination, wafers are generally stored in wafer boxes and transported through wafer boxes. In the traditional technology, the handling of wafer cassettes in warehouses, production workshops, etc. is generally carried out manually, which consumes a lot of manpower. [0003] In order to solve the above-mentioned problems in the conventional technology, the prior art proposes a wafer handling robot for handling wafer cassettes. In the existing wafer box handling robot, the mechanical arm is generally installed on the automatic guided vehicle (English full name: Automated Guided Vehicle, referred to as: AGV), and the mechanical arm is equipped with a gripp...

Claims

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Application Information

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IPC IPC(8): B25J5/00B25J19/00
CPCB25J5/007B25J19/00
Inventor 黄宗勇丁凯旋杨超
Owner SHENZHEN YOUIBOT ROBOTICS CO LTD
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