Manufacturing process of ceramic piezoresistive sensor

Abstract

The invention provides a manufacturing process of a ceramic piezoresistive sensor. A ceramic piezoresistive sensor manufacturing device is used. The device comprises a machine body, a pressing die driving mechanism, an upper die mechanism, a hand-operating mechanism and a lower die mechanism, wherein the pressing die driving mechanism and the lower die mechanism are both arranged on the upper end face of the machine body, and the upper die mechanism is arranged on the pressing die driving mechanism. The problems existing in the manufacturing process of the ceramic piezoresistive sensor can be solved as follows: a, hot-pressing shaping of ceramic is inconvenient, demolding is mostly carried out manually, the operation is complex, and the working difficulty is increased; and b, natural cooling is needed after demolding, the manufacturing time is greatly prolonged, and the working efficiency is reduced. According to the manufacturing process, the ceramic can be automatically subjected to hot pressing manufacturing, and operation is convenient; demolding can be conducted after the ceramic is subjected to hot manufacturing through an arranged demolding unit; the ceramic subjected to hot manufacturing can be cooled through an arranged cooling unit, and the cooling time is shortened; and thus, the working efficiency is improved.

Description

technical field [0001] The invention relates to the technical field of ceramic piezoresistive sensors, in particular to a manufacturing process of ceramic piezoresistive sensors. Background technique [0002] The ceramic pressure sensor is mainly composed of three parts: a ceramic ring, a ceramic diaphragm and a ceramic cover. As a force-sensitive elastic body, the ceramic diaphragm is made of 95% AL2O3 porcelain and requires flatness, uniformity and dense quality. Its thickness and effective radius depend on the design range. The ceramic ring is fired at high temperature by hot die casting process. The high-temperature glass paste is used between the ceramic diaphragm and the ceramic ring, and they are fired together by thick film printing and thermal firing technology to form a force-sensitive cup-shaped elastic body fixed around the periphery, that is, the fixed part around the ceramic should be formed Rigid construction without creep. On the upper surface of the ceram...

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Problems solved by technology

[0005] The invention provides a ceramic piezoresistive sensor manufacturing process, which can solve the following problems in the ceramic piezoresistive sensor manufacturing process: a. It is not convenient to heat-press the ceramics, and the demoulding is mostly done manually, and the operation is complicated , which increases the difficulty of work; b. Natural cooling is required after demoulding, which greatly prolongs the manufacturing time and reduces work efficiency

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