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multilayer coupling structure

A coupling structure and coupling waveguide technology, applied in the coupling of optical waveguides, instruments, optical waveguides and light guides, etc., can solve the problems of long coupling length, increase chip area, etc., and achieve shortened coupling length, high coupling efficiency, and broad application prospects. Effect

Active Publication Date: 2022-02-22
INST OF SEMICONDUCTORS - CHINESE ACAD OF SCI
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Problems solved by technology

[0004] The coupling structure can realize the free transmission of light between adjacent layers. In the scheme of evanescent wave coupling, two tapered waveguide structures are mostly used, but this structure requires a long coupling to achieve high coupling efficiency. Length, the application in the optical network that requires a large number of coupling structures will undoubtedly greatly increase the chip area, so it is necessary to improve the design of the coupling structure

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Embodiment 1

[0088] In this embodiment, using as Figure 4 The multilayer coupling structure shown. Wherein, the material of the substrate layer 1 is silicon with a thickness of 100 μm, and the material of the cladding layer 2 is silicon dioxide. The number of waveguide layers in the multilayer coupling structure is 3 layers, that is, N=3. The first waveguide layer 3, the second waveguide layer 4 and the third waveguide layer 5' are stacked sequentially from bottom to top in the cladding layer 2, and the first waveguide layer 3, the second waveguide layer 4 and the third waveguide layer 5' The material is silicon and adopts a rectangular structure. Wherein, the width of the first waveguide 7, the second waveguide 8 and the third waveguide 9' is 0.4 μm, the thickness is 220nm, and the thickness of the cladding between each waveguide layer is 300nm.

[0089] in addition, Figure 4 In the two groups of coupled waveguide structures shown in , the width of the first tapered waveguide 11 in ...

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Abstract

The present disclosure proposes a multi-layer coupling structure, including: a substrate layer and a cladding layer, in which a plurality of waveguide layers are sequentially stacked. Wherein, each waveguide layer is provided with a transmission waveguide structure and a coupling waveguide structure, wherein the coupling waveguide structure includes two sections of different tapered waveguide structures. The optical signal is input through the first waveguide layer, and through the evanescent wave coupling, it is continuously coupled upwards through the middle waveguide layers, and finally output at the Nth waveguide layer, so that the input light can be transmitted to any waveguide layer. The multilayer coupling structure in the present disclosure is small in size and high in coupling efficiency, so that the entire multilayer coupling chip meets the requirements of miniaturization and high performance.

Description

technical field [0001] The present disclosure relates to the field of three-dimensional photon integration, and in particular to a multilayer coupling structure. Background technique [0002] In recent years, with the continuous maturity of photonic integration technology, photonic integrated chips are not limited to single-layer planar structures, and large-scale double-layer optical switch networks have also been realized, which greatly reduces the size of chips, and in the new free Based on the degree, more complex structures can be designed to achieve more complex functions. With the continuous update of technology and the continuous improvement of the requirements for the integration of optical interconnection networks, more layers of optical network architecture will become the future development trend. [0003] In the entire multi-layer optical network structure, the most critical is the design of the inter-layer coupling structure. The more multi-layer network archi...

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B6/12G02B6/122G02B6/26
CPCG02B6/12002G02B6/122G02B6/26
Inventor 李绍洋王玥王亮亮吴远大安俊明
Owner INST OF SEMICONDUCTORS - CHINESE ACAD OF SCI
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