multilayer coupling structure
A coupling structure and coupling waveguide technology, applied in the coupling of optical waveguides, instruments, optical waveguides and light guides, etc., can solve the problems of long coupling length, increase chip area, etc., and achieve shortened coupling length, high coupling efficiency, and broad application prospects. Effect
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[0088] In this embodiment, using as Figure 4 The multilayer coupling structure shown. Wherein, the material of the substrate layer 1 is silicon with a thickness of 100 μm, and the material of the cladding layer 2 is silicon dioxide. The number of waveguide layers in the multilayer coupling structure is 3 layers, that is, N=3. The first waveguide layer 3, the second waveguide layer 4 and the third waveguide layer 5' are stacked sequentially from bottom to top in the cladding layer 2, and the first waveguide layer 3, the second waveguide layer 4 and the third waveguide layer 5' The material is silicon and adopts a rectangular structure. Wherein, the width of the first waveguide 7, the second waveguide 8 and the third waveguide 9' is 0.4 μm, the thickness is 220nm, and the thickness of the cladding between each waveguide layer is 300nm.
[0089] in addition, Figure 4 In the two groups of coupled waveguide structures shown in , the width of the first tapered waveguide 11 in ...
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