3dB directional coupler capable of shortening coupling length and manufacturing method thereof
A directional coupler and coupling length technology, applied in the directions of instruments, light guides, optics, etc., can solve the problems of small process tolerance, low coupling efficiency, shortening coupling length, etc., to reduce insertion loss, expand process tolerance, and shorten coupling. effect of length
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Embodiment 1
[0044] Embodiment 1: a kind of 3dB directional coupler that shortens coupling length, as figure 1 As shown, a substrate 6 is included, and the material of the substrate 6 is a single crystal silicon or a quartz plate; the substrate 6 is covered with a lower cladding layer 3, an intermediate cladding layer 4 and an upper cladding layer 5 in order from bottom to top, and the middle A first coupling waveguide 1 is provided in the cladding layer 4, a second coupling waveguide 2 is provided in the upper cladding layer 5, and the first coupling waveguide 1 and the second coupling waveguide 2 are arranged in parallel; the first coupling waveguide 1 and the second coupling waveguide The coupling waveguide 2 is provided with an arc waveguide and a straight waveguide, the arc waveguide is arranged in the middle of the straight waveguide, and the arc waveguide and the straight waveguide are connected; the protrusion of the arc waveguide of the first coupling waveguide 1 is connected to th...
Embodiment 2
[0070] Embodiment 2: The difference between this embodiment and Embodiment 1 is that the waveguide width error and the vertical distance error of the coupling region are introduced in this embodiment.
[0071] In the 3dB directional coupler model of embodiment 1, the width and height of the waveguide are 6 μm, and the 3dB directional coupler is simulated in rsoft according to the standard model size, the optical energy output power of the first coupling waveguide 1 and the second coupling waveguide 2 exist Figure 6 are represented by dots on the solid line. However, in the actual processing process, the size of the waveguide will be affected by the technology to produce certain errors, resulting in the waveguide width fluctuating up and down in the required size of 6 μm. In order to test the tolerance of the present invention, in this embodiment, the waveguide width of the first coupled waveguide 1 is set to 6.05 μm, and the waveguide width of the second coupled waveguide 2 ...
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