Optical waveguide circuit and method for fabricating the same
A manufacturing method and a technology of conducting circuits, which are applied in the direction of optical waveguide light guide, coupling of optical waveguide, light guide, etc., can solve the problems of directional coupler coupling length becoming longer, coupling length increasing, increasing coupling length, etc., to reduce Effects of transmission loss, loss reduction, and scattering loss reduction
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no. 1 Embodiment approach
[0073] exist figure 1 , figure 2 , image 3 The optical waveguide of the first embodiment of the present invention is shown in . figure 1 for top view, figure 2 for figure 1 A cross-sectional view in the direction of line Ib-Ib, image 3 for figure 1 Sectional view along line Ic-Ic.
[0074]The optical waveguide includes: a lower cladding layer 102 formed on a substrate 101; a first core 103 having a substantially rectangular cross section formed on the lower cladding layer 102; The core 104 ; the upper cladding layer 105 formed on the lower cladding layer 102 so as to embed the first core 103 and the second core 104 .
[0075] The surface of the second core 104 is smoothly shaped. Although unevenness occurs on the surface of the first cladding 103 when it is formed, the second core 104 is provided between the first core 103 and the upper cladding 105, so that the second core 104 and the upper cladding 105 The interface with the first core 103 is smoother than t...
no. 2 Embodiment approach
[0083] exist Figure 4 , Figure 5 , Image 6 , Figure 7 The optical waveguide circuit according to the second embodiment of the present invention is shown in . Figure 4 for top view, Figure 5 for Figure 4 A sectional view in the direction of line IIb-IIb, Image 6 for Figure 4 Sectional view in the direction of line IIc-IIc, Figure 7 for Figure 4 Sectional view along line IId-IId.
[0084] The optical waveguide circuit makes optical signals branch from at least one optical waveguide 211 into multiple optical waveguides 213, or merges from multiple optical waveguides 213 into at least one optical waveguide 211, and can be used to branch optical signals into multiple optical waveguides 213. A branch circuit of the waveguide 213 or a confluence circuit in which a plurality of optical waveguides 213 join. In addition, it can be used as a branch circuit or a confluence circuit for optical signals of a single wavelength or multiple different wavelengths.
[0085] ...
no. 3 Embodiment approach
[0091] exist Figure 8 , Figure 9 , Figure 10 , Figure 11 , shows an optical waveguide circuit according to a third embodiment of the present invention. Figure 8 for top view, Figure 9 for Figure 8 Sectional view in the direction of line IIIb-IIIb, Figure 10 for Figure 8 Sectional view in the direction of line IIIc-IIIc, Figure 11 for Figure 8 Section view along line IIId-IIId.
[0092] This optical waveguide circuit constitutes a one-input two-output type circuit, that is, a Y-branch type circuit in the second embodiment.
[0093] Specific examples of the third embodiment are shown below. The substrate material, the material, size, and refractive index of each layer of the waveguide are the same as those in the first embodiment. A lower cladding 302 is provided on a substrate 301 , and a first core 303 ( 303A, 303B, 303T), a second core 304 , and an upper cladding 305 are provided on the lower cladding 302 . The waveguide 311 branches into a waveguide 31...
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