Automatic stereoscopic warehouse used for buffering and storing semiconductor components

Abstract

The invention discloses an automatic stereoscopic warehouse used for buffering and storing semiconductor components. The automatic stereoscopic warehouse comprises two sets of goods shelves arranged in parallel, a buffer-storing and feeding mechanism, a feeding and discharging transfer mechanism and a material taking and placement mechanism. The two sets of goods shelves are arranged in a spaced manner so as to form a transfer channel located between the two sets of goods shelves, and a butt joint channel communicating the inside and the outside of the goods shelves is formed in one set of goods shelves. The buffer-storing and feeding mechanism comprises a rack and a buffer-storing and carrying assembly arranged in the rack. The feeding and discharging transfer mechanism is arranged in the rack and located under the buffer-storing and carrying assembly. The material taking and placement mechanism comprises a horizontal guide rail arranged in the transfer channel, a lifting frame connected with the horizontal guide rail in a sliding manner and a taking and placement assembly connected with the lifting frame in a sliding manner. According to the automatic stereoscopic warehouse, the moving path for storing and taking materials is reduced, meanwhile, the materials can be stored and taken in two directions, and the storage and taking efficiency is improved while the storage capacity of the stereoscopic warehouse is improved.

Description

technical field [0001] The invention relates to the field of semiconductor processing equipment, in particular to an automated three-dimensional warehouse for caching semiconductor components. Background technique [0002] In the field of semiconductor processing equipment, it is well known that three-dimensional warehouses with different structures are used to store and take out materials. In the process of researching and realizing the storage and retrieval of materials, the researchers found that the three-dimensional warehouses in the prior art have at least the following problems: [0003] The structure is complex and bulky, which makes the moving path of the pick-and-discharge mechanism long, which greatly reduces the access efficiency; most of them can only access materials in one direction, which cannot maximize the use of plant space, reducing the storage capacity of the three-dimensional warehouse , also further reduces the storage efficiency. [0004] In view of...

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Problems solved by technology

[0003] The structure is complex and bulky, which makes the moving path of the pick-and-discharge mechanism long, which greatly reduces the access efficiency; most of them can only access materials in one direction, which cannot maximize the use of plant space, reducing the storage capacity of the three-dimensional warehouse , which further reduces the storage efficiency

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