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Capacitance measurement method based on electrostatic self-excited vibration principle

A technology of self-excited vibration and capacitance measurement, which is applied in the direction of capacitance measurement, measuring device, and measurement of electrical variables, etc., can solve the problems of complicated circuit debugging and low measurement resolution, achieve high resolution, simple test principle, and avoid measurement errors Effect

Active Publication Date: 2021-07-09
BEIHANG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0006] Aiming at the problems of complex circuit debugging and low measurement resolution in the existing capacitance measurement technology, the present invention provides a capacitance measurement method based on the principle of electrostatic self-excited vibration, which greatly improves the accuracy of the output electrical signal compared with pure electronic circuit components. resolution

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  • Capacitance measurement method based on electrostatic self-excited vibration principle
  • Capacitance measurement method based on electrostatic self-excited vibration principle

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Embodiment 1

[0028] Embodiment one: if figure 1 As shown, the capacitance measurement method based on the electrostatic self-excited vibration principle provided by the present invention includes a high-voltage DC power supply 1, a positive electrode plate 2, a negative electrode plate 3, a conductive microbeam 4, an insulating support 5, a capacitor to be measured 6, and a sampling resistor 7. Signal collector 8. Wherein, the positive pole of the high-voltage DC power supply 1 is connected to the positive electrode plate 2 , and the negative pole is connected to the negative electrode plate 3 . The conductive microbeam 4 is fixed on the insulating support 5 and placed between the positive electrode plate 2 and the negative electrode plate 3 . One end of the capacitor 6 to be tested is connected to the conductive micro-beam 4 , and the other end is connected to the negative pole of the high-voltage DC power supply 1 (grounded). One end of the sampling resistor 7 is connected to the negat...

Embodiment 2

[0030] Embodiment two: figure 1 The support method of the medium-conducting microbeam 4 adopts the form of simple support at both ends, and other technical features are the same as in the first embodiment.

[0031] The pulse voltage signal measured by the capacitance measurement method proposed by the present invention is as follows: figure 2 As shown, when the conductive microbeam 4 collides with the negative electrode plate 3, a main peak of the pulse voltage is generated at both ends of the sampling resistor 7; when the conductive microbeam 4 collides with the positive electrode plate 2, a secondary peak of the pulse voltage is generated at both ends of the sampling resistor 7. Wherein, the size of the capacitor 6 to be tested has a linear relationship with the main peak of the pulse voltage. In this example, the average amplitude of the main peak of the pulse voltage is 484.0V, and the calculated capacitance to be tested is 7.47pF.

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Abstract

The invention discloses a capacitance measurement method based on an electrostatic self-excited vibration principle. A high-voltage direct-current power supply, a positive electrode plate, a negative electrode plate, a conductive micro-beam, an insulating support, a sampling resistor, a capacitor to be measured and a signal collector are included, wherein the positive electrode plate and the negative electrode plate are relatively arranged in parallel. The conductive micro-beam is fixed on the insulating support and arranged between the positive and negative electrode plates, the positive and negative electrode plates are respectively connected with the positive and negative electrodes of the high-voltage DC power supply, one side of the sampling resistor is connected with the negative electrode plate, the other side is grounded, and the to-be-tested capacitor is connected between the root of the conductive micro-beam and the negative electrode of the power supply. When high-voltage direct current is applied to the positive and negative electrode plates, the conductive micro-beam excites self-excited vibration between the electrode plates, the signal collector measures pulse voltage generated at two ends of the resistor, the amplitude of the pulse voltage and the size of the to-be-measured capacitor form a linear relation, and the size of the to-be-measured capacitor can be calculated by collecting and analyzing the amplitude of the pulse voltage. The capacitance measurement method provided by the invention is simple in principle, high in measurement precision and suitable for measurement of pF-magnitude micro capacitance values.

Description

technical field [0001] The invention relates to the technical field of capacitance measurement, in particular to a high-precision capacitance measurement method based on the principle of self-excited vibration of microbeams in an electrostatic field. Background technique [0002] Capacitive sensor is a sensing element that converts the measured physical quantity into capacitance change. Because of its simple structure, good dynamic response, high temperature stability and high precision, it is widely used in displacement, angle, vibration, speed, pressure, Composition analysis, medium characteristics and other high-precision measurement occasions. [0003] The measurement of capacitance change is a key factor in determining the measurement accuracy of capacitive sensors. During the working process of the capacitive sensor, the change of the physical quantity to be measured causes the change of the capacitance of the sensing element, and the change of the capacitance is conv...

Claims

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Application Information

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IPC IPC(8): G01R27/26
CPCG01R27/2605
Inventor 刘志伟闫晓军刘馨怡漆明净竹阳升
Owner BEIHANG UNIV
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