Multifunctional sample test bench for X-ray electron spectrometer

Abstract

The invention provides a multifunctional sample test bench for an X-ray electron spectrometer. The multifunctional sample test bench comprises a first test bench and a second test bench which are made of non-magnetic materials, a sample can be placed on the first test bench, and the position of the sample can be adjusted in the horizontal X and Y directions; and the structure of the second test bench is the same as that of the first test bench, and a sample can be placed on the second test bench for position adjustment in the Z direction. The multifunctional sample test bench of the X-ray electron spectrometer solves the problem that an existing X-ray electron spectrometer is difficult to test special-shaped samples or samples with large sizes.

Description

technical field [0001] The invention belongs to the technical field of material analysis equipment, and in particular relates to a multifunctional sample test bench for an X-ray electron energy spectrometer. Background technique [0002] X-ray photoelectron spectrometer can analyze the valence state of the element composition of most solid samples, and can complete quantitative and semi-quantitative at the same time. It has been widely used in elemental analysis, multiphase research, and compound structure identification; it is oxidation, corrosion , friction, lubrication, combustion, catalysis, coating and other micro-mechanism research indispensable research tools. [0003] X-ray photoelectron spectrometer can test most solid samples, but it cannot test some special-shaped samples or larger-sized samples. The reason for the inability to test is mainly due to the relatively large volume of the sample, which cannot be fixed in the sample chamber. Contents of the invention...

AI Technical Summary

Problems solved by technology

[0004] The purpose of the present invention is to provide a multifunctional sample test bench for X-ray electron spectrometer, which solves the problem that it is difficult for existing X-ray photoelectron spectrometer to test samples with special shapes or larger sizes.

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