A grid design method of moems optical switch anti-high overload structure
A design method, optical switch technology, applied in the coupling of optical waveguides, design optimization/simulation, optics, etc.
Active Publication Date: 2022-07-15
BEIJING INSTITUTE OF TECHNOLOGYGY
View PDF8 Cites 0 Cited by
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
In addition, there are relatively few studies on how to improve the high overload resistance of MOEMS optical switches at home and abroad.
Method used
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View moreImage
Smart Image Click on the blue labels to locate them in the text.
Smart ImageViewing Examples
Examples
Experimental program
Comparison scheme
Effect test
Embodiment Construction
[0016] In order to make the objectives, technical solutions and advantages of the present invention clearer, the technical solutions in the implementation method of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. It should be noted that the specific embodiments described herein are only used to explain the present invention, and are not intended to limit the present invention. The described embodiments are only some of the embodiments of the present invention, and not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention. Numerous specific details of the present invention are described below, such as device structures, materials, dimensions, processing descriptions and techniques, in order to ...
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More PUM
| Property | Measurement | Unit |
|---|---|---|
| thickness | aaaaa | aaaaa |
| thickness | aaaaa | aaaaa |
| thickness | aaaaa | aaaaa |
Login to View More
Abstract
The invention relates to a grid design method of a MOEMS optical switch against high overload structure. Including the following content: MOEMS optical switch is composed of device layer (including input fiber, output fiber, movable micromirror, electrothermal insurance mechanism and electrothermal driving mechanism), buried oxygen layer and substrate layer. The substrate layer is designed as a hollow grid structure, which provides a limit stop structure for the device layer without affecting the movement of the movable micromirror of the device layer. When the MOEMS optical switch is subjected to a high overload perpendicular to the surface of the device layer When impacted, the grid-like structure of the substrate layer can limit the movement of the movable micromirror, the electrothermal insurance mechanism and the electrothermal driving mechanism in this direction, preventing them from breaking due to excessive deformation, and limiting the protection of the device layer. The technical problem to be solved by the present invention is: improving the high overload resistance capability of the MOEMS optical switch, which has the following advantages: (1) strong overload resistance capability; (2) small structure size; (3) stable operation and good reliability.
Description
technical field [0001] The invention relates to the technical field of designing an optical switch anti-high overload structure, in particular to a grid design method of a MOEMS optical switch anti-high overload structure. Background technique [0002] The fuze all-electronic safety system is a high-tech integrating fuze initiation technology and microelectronic technology. It is different from the traditional fuze safety system. However, in the actual use process, there are also a large number of potential electromagnetic safety hazards: due to the numerous electronic components of the fuze safety system and the complex integrated circuits, electromagnetic interference energy is easily generated between each part, which leads to the internal generation of the fuze safety system. Serious electromagnetic interference phenomenon, and the electromagnetic energy of the external environment is also easy to produce electromagnetic interference to the fuze system, thereby causing t...
Claims
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More Application Information
Patent Timeline
Login to View More Patent Type & Authority Patents(China)
IPC IPC(8): G02B6/35G06F30/23
CPCG02B6/3518G02B6/3584G06F30/23
Inventor 代俊张崇飞谢晋王齐伟熊壮唐彬刘莹邵瑞文董伟康
Owner BEIJING INSTITUTE OF TECHNOLOGYGY