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Rear-emitter solar cell structure having a heterojunction, and method and device for producing same

A solar cell and emitter technology that is used in photovoltaic power generation, final product manufacturing, sustainable manufacturing/processing, etc., and can solve problems affecting solar cell characteristics, etc.

Active Publication Date: 2021-08-24
MEYER BURGER (GERMANY) GMBH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0038] However, it has been shown that in the case of known back-emitter heterojunction solar cells, the shunt resistance and the reverse current can have considerable values, which affect the properties of the solar cell

Method used

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  • Rear-emitter solar cell structure having a heterojunction, and method and device for producing same
  • Rear-emitter solar cell structure having a heterojunction, and method and device for producing same
  • Rear-emitter solar cell structure having a heterojunction, and method and device for producing same

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Embodiment Construction

[0103] Figure 1a to Figure 1i The sub-steps of the process sequence of an embodiment of the method according to the invention for producing a back-emitter solar cell structure with a heterojunction are schematically shown according to a cross-sectional view of a correspondingly produced layer sequence, as for example in Figure 1i is schematically shown in cross-section. The layer thicknesses of the layers shown in the individual figures are not shown to scale here. Although the ratio of the respective layer thicknesses to one another is likewise not shown to scale, if one layer is shown thinner than another layer, this layer is usually also relatively thinner in practice.

[0104] In the figures, the side of the respective layer structure shown in each case at the top is the front side of the respective layer structure, while the side shown at the bottom is the rear side of the respective layer structure. The front side is the side where light is incident when the back emi...

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Abstract

The present invention relates to a rear-emitter solar cell structure having a heterojunction and to a method and a device for producing same. According to the invention, first a rear intrinsic layer is formed on the rear of the substrate, subsequently a front intrinsic layer and a front doping layer are formed on the front of the substrate, and finally a rear doping layer is formed on the rear of the substrate.

Description

technical field [0001] The invention relates to a method for manufacturing a back-emitter solar cell structure with a heterojunction, wherein [0002] - for constituting the absorber of the back-emitter solar cell structure, a doped crystalline semiconductor substrate having a first conductivity type is provided; [0003] - producing at least one front-side intrinsic layer of intrinsic, amorphous semiconductor material on the front side of the semiconductor substrate; [0004] - producing at least one front-side doped layer of amorphous semiconductor material having a higher doping of the first conductivity type than that of the semiconductor substrate on at least one front-side intrinsic layer; [0005] - producing at least one backside intrinsic layer made of intrinsic, amorphous semiconductor material on the backside of the semiconductor substrate; [0006] - in order to form the emitter of the back emitter solar cell structure on at least one rear intrinsic layer, at lea...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L31/20H01L31/0747H01L31/0224
CPCH01L31/202H01L31/0747H01L31/022425H01L31/1804Y02E10/547Y02E10/548Y02P70/50
Inventor 赵隽马赛尔·柯宁
Owner MEYER BURGER (GERMANY) GMBH