Fine adjustment thread assembly and processing apapratus

Abstract

The invention provides a fine adjustment screw assembly and a machining device, which can properly measure the load applied to a machining tool of a grinding tool. The fine adjustment thread assembly couples a first part and a second part to each other while keeping the first part and the second part spaced apart, adjusts the distance between the first part and the second part, and detects a load applied to the second part. The assembly includes first external threads that can be brought into threaded engagement with first internal threads formed in the first part, second external threads that are axially spaced from the first external threads, that have a thread pitch different from that of the first internal thread, and that can be brought into threaded engagement with second internal threads formed in the second part. A joint portion between the first external threads and the second external threads houses a load sensor under a compressive load.

Description

technical field [0001] The present invention relates to trimmer screw assemblies and processing devices. Background technique [0002] In a grinding device that grinds a workpiece held on a holding surface of a chuck table with a plurality of ring-shaped grinding tools attached to a grinding unit, the chuck table and the grinding unit are arranged as follows: Make the grinding tool pass through the center of the workpiece. [0003] Grinding of the workpiece held by the holding surface is performed in a radius region from the center of the workpiece to the outer periphery. In this radius region, the holding surface and the lower surface of the grinding tool are parallel to each other. In addition, the parallelism between the holding surface and the lower surface of the grinding wheel is adjusted based on the measurement result of the thickness of the workpiece after grinding. Therefore, an inclination adjustment mechanism for adjusting the parallelism between the holding s...

AI Technical Summary

Problems solved by technology

[0009] However, in the structure described in Patent Document 1, when the inclination of the chuck shaft unit or the spindle unit is changed by the inclination adjustment mechanism, the distance between the members sandwiching the load sensor changes.

At this time, when the distance between the parts sandwiching the load sensor increases, there are cases where it is difficult to apply a load to the load sensor and it is difficult to measure the load by the load sensor

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