Fine adjustment thread assembly and processing apapratus

A technology for fine-tuning screws and assemblies, used in grinding devices, grinding drive devices, metal processing equipment, etc., can solve the problem of difficulty in applying measurement loads, and achieve the effect of simple adjustment

Pending Publication Date: 2021-09-03
DISCO CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0009] However, in the structure described in Patent Document 1, when the inclination of the chuck shaft unit or the spindle unit is changed by the inclination adjustment mechanism, the distance between the members sandwiching the load sensor changes.
At this time, when the distance between the parts sandwiching the load sensor increases, there are cases where it is difficult to apply a load to the load sensor and it is difficult to measure the load by the load sensor

Method used

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  • Fine adjustment thread assembly and processing apapratus
  • Fine adjustment thread assembly and processing apapratus
  • Fine adjustment thread assembly and processing apapratus

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0023] like figure 1 As shown, the grinding apparatus 1 of this embodiment is an apparatus for grinding a wafer 100 as a workpiece, and has a rectangular parallelepiped main casing 10 and a column 11 extending upward.

[0024] The wafer 100 is, for example, a circular semiconductor wafer. exist figure 1 Among them, a plurality of devices are formed on the front surface 101 of the wafer 100 facing downward, and are protected by sticking a protective tape 105 . The back surface 104 of the wafer 100 is a surface to be processed which is subjected to grinding.

[0025] An opening 13 is provided on the upper surface side of the main case 10 . Furthermore, a holding unit 30 is arranged in the opening 13 . The holding unit 30 includes: a chuck table 31 having a holding surface 32 holding the wafer 100 ; and a support member 33 that supports the chuck table 31 . like figure 2 As shown, the support member 33 and the chuck table 31 are screwed together by screws 37 .

[0026] f...

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PUM

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Abstract

The invention provides a fine adjustment screw assembly and a machining device, which can properly measure the load applied to a machining tool of a grinding tool. The fine adjustment thread assembly couples a first part and a second part to each other while keeping the first part and the second part spaced apart, adjusts the distance between the first part and the second part, and detects a load applied to the second part. The assembly includes first external threads that can be brought into threaded engagement with first internal threads formed in the first part, second external threads that are axially spaced from the first external threads, that have a thread pitch different from that of the first internal thread, and that can be brought into threaded engagement with second internal threads formed in the second part. A joint portion between the first external threads and the second external threads houses a load sensor under a compressive load.

Description

technical field [0001] The present invention relates to trimmer screw assemblies and processing devices. Background technique [0002] In a grinding device that grinds a workpiece held on a holding surface of a chuck table with a plurality of ring-shaped grinding tools attached to a grinding unit, the chuck table and the grinding unit are arranged as follows: Make the grinding tool pass through the center of the workpiece. [0003] Grinding of the workpiece held by the holding surface is performed in a radius region from the center of the workpiece to the outer periphery. In this radius region, the holding surface and the lower surface of the grinding tool are parallel to each other. In addition, the parallelism between the holding surface and the lower surface of the grinding wheel is adjusted based on the measurement result of the thickness of the workpiece after grinding. Therefore, an inclination adjustment mechanism for adjusting the parallelism between the holding s...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B24B19/16B24B41/06B24B47/12B24B27/00B24B55/00B23B5/00
CPCB24B19/16B24B41/06B24B47/12B24B27/0076B24B27/0038B24B55/00B23B5/00B24B7/228B24B49/16B24B7/04B24B27/0069B24B27/0084B24B41/068B24B47/10B24B49/02B24B37/04H01L21/304B24B7/075B24B49/04
Inventor 力石利康和田健太郎
Owner DISCO CORP
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