Capacitive micro-mechanical accelerometer

A capacitive micro-machine, accelerometer technology, applied in the direction of measurement of acceleration, speed/acceleration/shock measurement, measurement device, etc., can solve problems affecting device stability, accelerometer structure deformation, affecting accelerometer stability, etc.

CN113391094AInactive Publication Date: 2021-09-14北京微元时代科技有限公司
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Publication Date
2021-09-14
Estimated Expiration
Not applicable · inactive patent

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Abstract

The invention relates to a capacitive micro-mechanical accelerometer. The accelerometer comprises a substrate, a clamped frame structure, a sensitive mass block frame structure, an anchor point for fixing the clamped frame structure on the substrate, an anchor point for fixing the accelerometer sensitive mass block frame structure on the substrate, a single-degree-of-freedom elastic beam for connecting the clamped frame structure and the sensitive mass block frame structure, a single-degree-of-freedom elastic beam connected with the sensitive mass block frame structure and the anchor point, and a detection electrode unit. The detection electrode unit is composed of a non-movable electrode, the anchor point for fixing the non-movable electrode, and a movable electrode connected to the accelerometer sensitive mass block frame structure. According to the invention, the axisymmetric structure is adopted, and the movable structure anchor points are arranged on the same symmetric axis so that the performance of the accelerometer is insensitive to an environment temperature change and processing errors. The accelerometer can be widely applied to object linear acceleration detection in various fields.
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Description

technical field

[0001] The invention relates to a micro-machine accelerometer, in particular to a capacitive micro-machine accelerometer which is insensitive to ambient temperature changes and processing errors. Background technique

[0002] Compared with traditional accelerometers, micro-mechanical accelerometers based on micro-electromechanical systems (MEMS) technology have the advantages of small size, light weight, low cost, and high reliability, and have been widely used in automotive, consumer electronics and other fields. The application requirements of high-precision micromachined accelerometers such as inertial navigation are also increasing.

[0003] Capacitive micromachined accelerometers usually use a comb-tooth capacitor structure. When there is an acceleration signal in the direction of the sensitive axis, the inertial sensitive mass drives the movable comb-tooth electrode to shift, resulting in a change in the plate spacing or overlapping area of ​​the comb-...

Examples

Embodiment Construction

[0017] The present invention will be described in detail below in conjunction with the accompanying drawings and embodiments.

[0018] Such as figure 1 In the illustrated embodiment, the accelerometer structures in the present invention are arranged axisymmetrically in the x-direction and y-direction, including anchor points 20A-20B and 30 for fixing the accelerometer movable structure on the substrate 10, and anchor points 20A-20B for fixing the accelerometer. The fixed frame structure 40 on the substrate 10, the sensitive mass frame structure 70, the single-degree-of-freedom elastic beams 60A-60D connecting the fixed frame structure 40 and the sensitive mass frame structure 70, the central anchor point 30 and the sensitive mass The single-degree-of-freedom elastic beams 50A-50D of the block frame structure 70, the detection electrode units 80A-80B, 90A-90B, 100A-100B, etc.

[0019] In the above embodiments, the accelerometer structures are distributed axisymmetrically in th...