Single-arm three-degree-of-freedom wafer transmission manipulator and using method thereof

A degree of freedom, manipulator technology, applied in electrical components, semiconductor/solid-state device manufacturing, circuits, etc., can solve problems such as difficult operation and small cassette capacity

Inactive Publication Date: 2021-09-14
G H S ADVANCED EQUIP TECH CO LTD
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  • Claims
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Problems solved by technology

[0005] Aiming at the deficiencies of the prior art, the present invention provides a single-arm three-degree-of-freedom wafer transport manipulator and its use method, which has th

Method used

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  • Single-arm three-degree-of-freedom wafer transmission manipulator and using method thereof
  • Single-arm three-degree-of-freedom wafer transmission manipulator and using method thereof
  • Single-arm three-degree-of-freedom wafer transmission manipulator and using method thereof

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[0034] Next, the technical solutions in the embodiments of the present invention will be apparent from the embodiment of the present invention, and it is clearly described, and it is understood that the described embodiments are merely embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, there are all other embodiments obtained without making creative labor without making creative labor premises.

[0035]As, in the prior art deficiencies described in the background art, in order to solve the above technical problem, the present application proposes - a single arm of the wafer transport robot types and methods of use of three degrees of freedom

[0036] A typical embodiment of the present application, as Figure 1-8 , The - kind of the wafer transfer robot and the single-arm method using the three degrees of freedom, comprising a fixed support comprising a base 1 and the corresponding top seat 2, is attached to vertical...

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Abstract

The invention relates to the field of wafer transmission mechanical arms, and discloses a single-arm three-degree-of-freedom wafer transmission mechanical arm and a using method thereof. One end of a mechanical claw is close to the upper portion of one side of a top-layer wafer through a vertical moving assembly, a rotating assembly and a radial moving assembly; a telescopic motor and the like are arranged, one end of an extension plate gradually gets close to the top wafer and is located above the wafer, the air exhaust assembly is started, the Bernoulli suction cup principle is utilized, the pressure intensity at the through hole is small, then the top wafer is adsorbed to one end of the extension plate, the top wafer is moved towards the outside of the wafer box by a certain distance by controlling the radial movement assembly, and then the wafer box is opened, subsequently, the top wafer can be conveniently transported by using a vacuum generator and the suction cup; and meanwhile, the operation space in the wafer box is expanded, the follow-up wafer can be conveniently operated by a mechanical claw, the suction cup turns over to adsorb the wafer through the arrangement of a reverse motor and the like, the storage capacity of the wafer box is improved, and the space utilization rate is increased.

Description

technical field [0001] The invention relates to the field of wafer transfer manipulators, in particular to a single-arm three-degree-of-freedom wafer transfer manipulator and a method of use thereof. Background technique [0002] As the production output and size of wafers continue to increase, the production and testing of wafers are required to develop in the direction of high-speed, continuous, and automated production. Due to the need to realize the rapid transfer of wafer stations in a limited space, high requirements are put forward for the working stability, motion accuracy, and cleanliness of the automatic transfer manipulator during wafer inspection. Therefore, as the core equipment for silicon wafer transmission and positioning in semiconductor inspection, the exploration of wafer transfer manipulator is of great significance to break the monopoly of foreign countries on China's high-end microscopic market and promote the development of my country's semiconductor in...

Claims

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Application Information

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IPC IPC(8): H01L21/687H01L21/67H01L21/683
CPCH01L21/68707H01L21/67265H01L21/6838
Inventor 尹明清
Owner G H S ADVANCED EQUIP TECH CO LTD
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