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Devices, systems, and methods for controlling floatation of a substrate

A technology for substrates and controllers, applied in the field of controlling the floating of substrates during substrate processing, capable of solving problems such as contaminated substrates, substrate scratches or other damage, mura, etc.

Pending Publication Date: 2021-09-21
KATEEVA
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This contact may cause scratches or other damage to the substrate, which in turn may cause the mura phenomenon and generate particulate matter that may contaminate the substrate surface

Method used

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  • Devices, systems, and methods for controlling floatation of a substrate
  • Devices, systems, and methods for controlling floatation of a substrate
  • Devices, systems, and methods for controlling floatation of a substrate

Examples

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Embodiment Construction

[0032] This specification and the drawings depicting aspects and embodiments should not be considered limiting. The claims define the scope of protection, including equivalents. Various mechanical, compositional, structural, electrical, and operational changes may be made without departing from the scope of the specification and claims. In some instances, well-known circuits, structures and techniques have not been shown or described in detail so as not to obscure the invention. In various embodiments, like numbers in two or more figures represent the same or similar elements.

[0033] Furthermore, the terms of this specification are not intended to limit the scope of the claims. For example, spatially relative terms such as "below", "below", "lower", "above", "above", "proximal", "distal", "x-direction", "y-direction", "z Direction" and the like may be used to describe the relationship of one element or feature to another element or feature. In addition to the position an...

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PUM

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Abstract

A system comprises a floatation table comprising a plurality of ports to flow gas sufficient to produce a gas bearing to float a substrate over the floatation table; a fluidic network coupled to supply gas to the plurality of ports of the floatation table; and a controller configured to control the fluidic network to independently control flows of gas through ports of the plurality of ports disposed in each of a first zone, a second zone, and a third zone of the floatation table. The first, second, and third zones are defined by sections of the floatation table extending parallel to a direction the substrate is conveyed along the floatation table. The first zone is defined by a central section of the floatation table disposed between two sections defining the second zone, and the first and second zones are disposed between two sections defining the third zone.

Description

[0001] Cross References to Related Applications [0002] This application claims priority to U.S. Provisional Application Serial No. 62 / 784,216, entitled "Apparatus, System, and Method for Controlling Substrate Floatation," filed December 21, 2018, the entire contents of which are incorporated herein by reference. technical field [0003] The present disclosure generally relates to apparatus, systems and methods for supporting substrates via floating, such as during processing of the substrates. More specifically, the present disclosure relates to controlling floating of a substrate during substrate processing for manufacturing electronic display devices. Background technique [0004] Electronic devices, such as optoelectronic devices, can be fabricated using various thin film deposition and processing techniques, where one or more layers of material are deposited onto a substrate, which can be a sacrificial substrate or be part of the final device. [0005] Examples of su...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/67B05B13/02B05C5/02B05C13/02B05D1/26H10K99/00
CPCB05C13/02B05B13/02B05D1/26B05D2252/00B65H5/228H01L21/67784B65G2249/045B65G49/065B65H2406/112B65H2406/1132B65H2801/61H10K71/40H10K71/135B65G2249/00H10K71/00
Inventor 迪格佰·潘
Owner KATEEVA
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