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Self-checking surface acoustic wave sensor and checking method thereof

A surface acoustic wave and self-calibration technology, which is applied in the direction of transmitting sensing components and instruments by means of a wave/particle radiation device, can solve the problems that the resonant frequency is susceptible to electromagnetic interference and the code capacity of the surface acoustic wave sensor is small, and achieves an improvement. Effects of detection accuracy and reliability, avoidance of false detection, and improvement of code capacity

Active Publication Date: 2021-09-28
北京国声智能科技有限公司
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0006] The embodiment of the present invention provides a self-verifying surface acoustic wave sensor to solve the technical problems in the prior art that the resonant frequency of the wireless surface acoustic wave sensor is susceptible to electromagnetic interference and the code capacity of the surface acoustic wave sensor is small

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  • Self-checking surface acoustic wave sensor and checking method thereof
  • Self-checking surface acoustic wave sensor and checking method thereof

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Embodiment Construction

[0023] In order to make the purpose, technical solution and advantages of the present invention clearer, the technical solution of the present invention will be clearly and completely described below in conjunction with specific embodiments of the present invention and corresponding drawings. Apparently, the described embodiments are only some of the embodiments of the present invention, but not all of them. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0024] The technical solutions provided by various embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings.

[0025] The self-verifying surface acoustic wave sensor includes a substrate 1, and a plurality of resonators with different frequencies and different sensing coefficients are arranged on the surf...

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Abstract

The invention discloses a self-checking surface acoustic wave sensor which comprises a substrate, reflecting gratings, interdigital transducers and a sensor signal input / output common port; a single-port multi-channel integration mode is adopted, each surface acoustic wave channel in the sensor works independently, each channel is provided with the independent input and output interdigital transducers and reflecting gratings, and the channels are finally converged to the common input and output port. According to the invention, resonators of multiple channels are integrated on the same chip in a standard packaging shell, so that mutual verification among the multiple resonators can be realized, the sensor can effectively eliminate interference signals, the precision is greatly improved, and the code capacity of the sensor is improved at the same time.

Description

technical field [0001] The invention relates to the field of surface acoustic wave sensors, in particular to a self-verifying surface acoustic wave sensor and a verification method thereof. Background technique [0002] The surface acoustic wave is an elastic wave transmitted on the shallow surface of a solid. When the voltage is applied to the electrode of the substrate material with piezoelectric properties, an acoustic wave will be formed on the surface of the piezoelectric crystal material. The surface acoustic wave is a piezoelectric wave An elastomechanical wave that propagates on the surface of a crystalline material and whose amplitude decreases rapidly with increasing depth into the substrate material. [0003] The physical structure of surface acoustic wave device mainly consists of three parts: interdigital transducer (IDT), substrate and reflection grid. The interdigital transducer is used to complete the exchange between the electromagnetic wave and the sound w...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01D5/48G01D18/00
CPCG01D5/48G01D18/00
Inventor 万仲飞
Owner 北京国声智能科技有限公司