Line spectrum confocal sensor

Abstract

A line spectrum confocal sensor comprises a light source, a light source optical fiber, a dispersion objective lens, a spectrograph optical fiber and a spectrograph, wherein the dispersion objective lens comprises a first lens group and a second lens group which are sequentially arranged from the object space of the dispersion objective lens to the image space of the dispersion objective lens, the first lens group is used for controlling telecentricity of the object space and carrying out preliminary dispersion on modulation detection light, the second lens group is used for controlling the telecentricity of the image space and further dispersing the modulated detection light, the long focal length of the first lens group and the short focal length of the second lens group are matched to control the zoom ratio between the object space of the dispersion objective lens and the image space of the dispersion objective lens, and the spectrograph is used for distinguishing the wavelength of an echo and generating images at different pixel positions on the camera. According to the line spectrum confocal sensor system, the dispersion objective lens is designed into a double-telecentric structure, so that the consistency of the brightness and the precision of a measurement light spot projected on a measured object can be effectively ensured.

Description

technical field [0001] The invention belongs to the field of optics, in particular to a line spectrum confocal sensor. Background technique [0002] With the rapid development of precision and ultra-precision manufacturing, the demand for high-precision detection is also increasing, so high-precision displacement sensors have also emerged as the times require. The precision of the ultra-precise displacement sensor can reach the micron level; although the traditional contact measurement also has high precision, it may scratch the surface of the measured object, and when the measured object is a weak rigidity or a light and soft material, Contact measurement will also cause elastic deformation and introduce measurement errors. In addition, the contact measurement speed is slow and it is difficult to realize automatic measurement. Based on the many shortcomings of contact measurement, non-contact displacement sensors have received greater attention. [0003] The spectral confo...

AI Technical Summary

Problems solved by technology

Usually, the above problems can be solved by increasing the number of optical channels, but simply increasing the number of optical channels cannot actually solve the contradiction between line length and resolution, because the increase in the number of optical channels (optical fibers) will introduce the above-mentioned non-central light The problem of channel consistency makes the design of the optical path too difficult. At the same time, there are also problems of high cost, excessive volume and weight.

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