Equipment remote predictive maintenance system and method based on Internet mode

Abstract

The invention discloses an equipment remote predictive maintenance system and method based on an internet mode. The system comprises a data acquisition module, a database management module and a prediction maintenance module, wherein the data acquisition module is connected with the microelectronic manufacturing equipment and is used for acquiring running state information of the microelectronic manufacturing equipment in real time; the database management module is connected with the data acquisition module and is used for receiving and storing the running state information; and the prediction and maintenance module is connected with the database management module and is used for extracting the running state information stored in the database management module and carrying out state trend prediction, residual life prediction and maintenance scheme determination on the microelectronic manufacturing equipment according to the extracted running state information. According to the remote predictive equipment maintenance system and method based on the internet mode, predictive maintenance analysis of the microelectronic manufacturing equipment can be realized, early symptoms of faults can be identified in advance, sudden faults can be avoided, the safety and reliability of the microelectronic manufacturing equipment can be improved, and the maintenance cost can be reduced.

Description

technical field [0001] The invention relates to the technical field of microelectronic manufacturing equipment, in particular to an Internet-based remote predictive maintenance system and method for equipment. Background technique [0002] With the rapid development of the microelectronics industry, the development of microelectronics manufacturing equipment is gradually developing in the direction of intelligence and automation, and the demand for monitoring the production process of microelectronics manufacturing equipment is also increasing. [0003] In the process of operation and maintenance of traditional microelectronics manufacturing equipment, after-the-fact maintenance is usually used for equipment maintenance. Post-event maintenance, also known as restorative maintenance, is the first maintenance activity to be carried out after a complex equipment system fails. After-event maintenance is based on whether the equipment is in good condition or whether it can be use...

AI Technical Summary

Problems solved by technology

Although after-the-fact maintenance can maximize the effective life of the equipment, if a sudden failure occurs, it may cause greater economic losses, and may even lead to safety accidents in severe cases

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