Panel defect detection device and detection method

Abstract

The embodiment of the invention discloses a panel defect detection device and method. The device comprises a light source module, a beam splitting module, a focusing module, a diaphragm module, an imaging module and a processing module, the light source module comprises a plurality of linear light sources arranged in parallel, and the diaphragm module comprises a plurality of light-transmitting areas arranged in parallel; the linear light source is used for emitting detection light, the detection light passes through the beam splitting module and then enters the focusing module, the focusing module is used for converging the detection light on the surface of a panel to be detected, and returned light passes through the beam splitting module and then enters the light-transmitting area conjugated with the linear light source; the light-sensitive surface of the imaging module faces the light-transmitting area and is used for converting a received light signal into an electric signal; AND the processing module is electrically connected with the imaging module and used for detecting surface defects of the to-be-detected panel according to the electric signals. According to the technical scheme provided by the embodiment of the invention, the false detection rate of the panel defect detection device on the back pollution of the panel and the contact area of the support rod can be reduced, and the production detection speed of the panel is effectively improved.

Description

technical field [0001] Embodiments of the present invention relate to optical detection technology, and in particular to a panel defect detection device and detection method. Background technique [0002] Automated Optical Inspection (AOI) equipment, as an optical-based defect detection tool, is widely used in solar cells, integrated circuits, display panels and other industries to achieve rapid non-destructive detection of mask and silicon wafer defects. Among them, the automatic optical detection equipment for panel defects has the ability to perform real-time defect detection on large-area panel materials (taking the 6th generation panel as an example, the size of the glass substrate reaches 1.85m×1.5m), and is widely used in domestic and foreign panels. manufacturer. [0003] The automatic optical inspection device for panel defects usually uses bright field illumination to illuminate the material to be tested, and adjusts the configuration of the lighting source to inc...

AI Technical Summary

Problems solved by technology

The defect detection algorithm may identify out-of-focus images of back-side contamination, scratches, etc. as defects due to the blending of out-of-focus images of backside contamination, scratches, etc., with clear images of the front side

Wrong defect identification results will increase the false detection rate of the panel automatic defect detection device, increase the workload of defect re-inspection, and reduce the speed of panel production inspection, resulting in cost losses for customers

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