Infrared sensor chip based on semiconductor integrated circuit technology and manufacturing method thereof

Abstract

The invention provides an infrared sensor chip based on a semiconductor integrated circuit process and a manufacturing method thereof, and relates to the field of semiconductor technology. The infrared sensor chip based on a semiconductor integrated circuit process includes a substrate and a microbridge structure, and the microbridge structure is arranged on the substrate. , the micro-bridge structure includes a suspended area above the substrate; the suspended area of ​​the micro-bridge structure includes a transistor layer, an infrared absorbing layer, and a first electrical wiring pattern layer, and the first electrical wiring pattern layer is located on the side of the transistor layer facing the substrate , the first electrical lead pattern layer includes a plurality of first electrical leads, each first electrical lead is provided with a deformed beam on one side facing the substrate, each deformed beam is provided with a suspension electrode at one end away from the first electrical lead, adjacent Two first electrical leads connected by two pendant electrodes through corresponding deformable beams form a first capacitor. The infrared sensor chip based on the semiconductor integrated circuit technology provided by the invention is used for detecting the illumination intensity of infrared light.

Description

technical field [0001] The invention relates to the technical field of semiconductors, in particular to an infrared sensor chip based on a semiconductor integrated circuit process and a manufacturing method thereof. Background technique [0002] The infrared detection chip (Infrared Detector) is a device that converts the incident infrared radiation signal into an electrical signal output. Infrared radiation is electromagnetic waves with wavelengths between visible light and microwaves, which cannot be detected by the human eye. To detect the existence of this radiation and measure its strength, it must be transformed into other physical quantities that can be detected and measured. Generally speaking, any effect caused by infrared radiation irradiating an object can be used to measure the intensity of infrared radiation as long as the effect can be measured and is sensitive enough. Modern infrared detection chips mainly use infrared thermal effect and photoelectric effect...

AI Technical Summary

Problems solved by technology

[0003] However, the infrared detection chip of the related art has low detection accuracy to the intensity of infrared light. For this reason, an infrared sensor chip based on semiconductor integrated circuit technology with higher detection accuracy is required.

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