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Pressure control device and system

A technology of pressure control and valve body, which is applied in the direction of fluid pressure control, control/regulation system, electric fluid pressure control, etc. It can solve the problems of difficult maintenance and numerous wiring, and achieve easy maintenance, reduce wiring difficulty, and compatibility high effect

Pending Publication Date: 2021-10-29
BEIJING SEMICORE PRECISION MICROELECTRONICS EQUIP CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] Therefore, the technical problem to be solved by the present invention is to overcome the defects of numerous connections and difficult maintenance in the prior art, thereby providing a pressure control device and system

Method used

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Embodiment Construction

[0021] The technical solutions of the present invention will be clearly and completely described below in conjunction with the accompanying drawings. Apparently, the described embodiments are some of the embodiments of the present invention, but not all of them. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0022] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer" etc. The indicated orientation or positional relationship is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the referred device or element must have a specific orientation, ...

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Abstract

The invention discloses a pressure control device and system, the pressure control device comprises a confluence board and at least one group of valve body modules, each electronic component in the valve body modules is connected with the confluence board, and the confluence board is provided with a signal interface used for being connected with an external I / O acquisition module. Through the implementation of the pressure control device, the problems that when the pressure control device inputs and outputs signals, wiring is numerous, maintenance is not easy, rewiring is needed after the I / O acquisition module is replaced, and compatibility is poor are solved.

Description

technical field [0001] The invention relates to the technical field of pressure control, in particular to a pressure control device and system. Background technique [0002] During the polishing process of the wafer, it is necessary to exert pressure on the back of the wafer to make the front of the wafer fully contact with the polishing pad for polishing or switch the positive pressure to negative pressure after the process is completed to make the wafer adsorb on the carrier to transfer. The pressure control device that completes the above process is usually composed of multiple electronic components such as solenoid valves, electric proportional valves and air pressure sensors, such as figure 1 The pressure control device shown is composed of 4-channel valve body modules, and each channel valve body module includes 4 solenoid valves, 1 electric proportional valve and 1 air pressure sensor. [0003] Because the existing pressure control device needs to connect the electr...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G05D16/20
CPCG05D16/2026
Inventor 王嘉琪张为强
Owner BEIJING SEMICORE PRECISION MICROELECTRONICS EQUIP CO LTD
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